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DESIGN BASED DEVICE RISK ASSESSMENT

  • US 20120216169A1
  • Filed: 02/17/2012
  • Published: 08/23/2012
  • Est. Priority Date: 02/22/2011
  • Status: Active Grant
First Claim
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1. A method for design based assessment of a device, comprising:

  • defining a plurality of patterns of interest utilizing design data of the device;

    generating a design based classification database, the design based classification database including design data associated with each of the patterns of interest;

    receiving one or more inspection results;

    comparing the one or more inspection results to each of the plurality of patterns of interest in order to identify an occurrence of at least one of the patterns of interest in the inspection results;

    determining yield impact of each pattern of interest utilizing process yield data;

    monitoring a frequency of occurrence of each of the patterns of interest and the criticality of the patterns of interest in order to identify one or more process excursions of the device; and

    determining a device risk level by calculating a normalized polygon frequency for the device utilizing a frequency of occurrence for each of the critical polygons and a criticality for each of the critical polygons, the critical polygons defined utilizing design data of the device.

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