MEMS Device With Enhanced Resistance to Stiction
First Claim
1. A microelectromechanical systems (MEMS) device comprising:
- a substrate;
a movable element suspended above said substrate and adapted for motion relative to said substrate; and
a secondary structure extending from said movable element and suspended above said substrate, said secondary structure being adapted for movement counter to said motion of said movable element.
31 Assignments
0 Petitions
Accused Products
Abstract
A MEMS device (20) includes a substrate (24) and a movable element (22) adapted for motion relative to the substrate (24). A secondary structure (46) extends from the movable element (22). The secondary structure (46) includes a secondary mass (54) and a spring (56) interconnected between the movable element (22) and the mass (54). The spring (56) is sufficiently stiff to prevent movement of the mass (54) when the movable element (22) is subjected to force within a sensing range of the device (20). When the device (20) is subjected to mechanical shock (66), the spring (56) deflects so that the mass (54) moves counter to the motion of the movable element (22). Movement of the mass (54) causes the movable element (22) to vibrate to mitigate stiction between the movable element (22) and other structures of the device (20) and/or to prevent breakage of components within the device (22).
41 Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a movable element suspended above said substrate and adapted for motion relative to said substrate; and a secondary structure extending from said movable element and suspended above said substrate, said secondary structure being adapted for movement counter to said motion of said movable element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a movable element suspended above said substrate and adapted for motion relative to said substrate; and a secondary structure extending from said movable element and suspended above said substrate, said secondary structure including a secondary mass and a spring element interconnected between said movable element and said secondary mass, said spring element exhibits a stiffness, and said stiffness of said spring element enables movement of said secondary mass counter to said movable element when said movable element is subjected to a force that is greater than a sensing range of said MEMS device, and said stiffness of said spring element substantially prevents said movement of said secondary mass counter to said movable element when said movable element is subjected to a force within said sensing range of said MEMS device. - View Dependent Claims (15, 16)
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17. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a movable element suspended above said substrate, said movable element being adapted for motion relative to a rotational axis interposed between first and second ends of said movable element, said movable element including a first section between said rotational axis and said first end and a second section between said rotational axis and said second end; and a secondary structure extending from said second end of said movable element and suspended above said substrate, said secondary structure including a secondary mass and a spring element interconnected between said second end of said movable element and said secondary mass, said secondary mass being adapted for movement counter to said motion of said movable element when said movable element is subjected to a force that is greater than a sensing range of said MEMS device. - View Dependent Claims (18, 19, 20)
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Specification