METHOD OF CALCULATING MODEL PARAMETERS OF A SUBSTRATE, A LITHOGRAPHIC APPARATUS AND AN APPARATUS FOR CONTROLLING LITHOGRAPHIC PROCESSING BY A LITHOGRAPHIC APPARATUS

• US 20120218533A1
• Filed: 02/23/2012
• Published: 08/30/2012
• Est. Priority Date: 02/25/2011
• Status: Abandoned Application

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Simons, Hubertus Johannes Gertrudus, Tenner, Manfred Gawein, Van Kemenade, Marc, LYULINA, Irina, Heres, Pieter Jacob, Slotboom, Daan Maurits, Van Der Sanden, Stefan Cornelis Theodorus
• Application Number:
  US13/403,538
• Publication Number:
  US 20120218533A1
• Time in Patent Office: Days
• US Class Current: 355/53
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7046 Strategy, e.g. mark, sensor or wavelength selection

Abstract

Estimating model parameters of a lithographic apparatus and controlling lithographic processing by a lithographic apparatus includes performing an exposure using a lithographic apparatus projecting a pattern onto a wafer. A set of predetermined wafer measurement locations is measured. Predetermined and measured locations of the marks are used to generate radial basis functions. Model parameters of said substrate are calculated using the generated radial basis functions as a basis function across said substrate. Finally, the estimated model parameters are used to control the lithographic apparatus in order to expose the substrate.

Claims

1. A method of calculating model parameters of a substrate in an apparatus, the method comprising:

measuring locations of marks on the substrate in the apparatus;

using measured locations of the marks to generate radial basis functions; and

,

calculating model parameters of said substrate in said apparatus using the generated radial basis functions as a basis function across said substrate.

2. The method according to claim 1, wherein using measured locations of the marks comprises using predetermined and measured locations of the marks.

3. The method according to claim 1, wherein said radial basis function is selected from the group consisting of:

a Gaussian basis function, an inverse basis function, a multiquadratic basis function, an inverse quadratic basis function, a spline degree k basis function and a thin plate spline basis function.

4. The method according to claim 2, wherein the calculating model parameters of said substrate in the apparatus comprises:

constructing a matrix using said radial basis functions and said predetermined mark locations.

5. The method according to claim 1, wherein said predetermined mark locations are optimized to increase accuracy of said calculated model parameters.

6. The method according to claim 5, wherein said predetermined mark locations are optimized using an algorithm comprising a Voronoi diagram.

7. The method according to claim 1 wherein the radial basis function comprises a relaxation parameter.

8. The method according to claim 1 wherein the apparatus is a lithographic apparatus and the method further comprises:

performing a lithographic process using said lithographic apparatus across a substrate; and

controlling the lithographic process by said lithographic apparatus using said calculated model parameters.

9. The method according to claim 1, wherein the apparatus is a lithographic apparatus comprising first and second substrate tables and the method further comprises:

measuring locations of marks on the substrate on the first and second substrate table in the apparatus.

10. The method according to claim 9, wherein the method further comprises:

using measured locations of the marks on the substrate on the first and second substrate table to generate radial basis functions for the substrate on the first and second substrate table and,

calculating model parameters of said substrate on the first and second substrate table in said apparatus using the generated radial basis functions as a basis function across said substrate.

11. The method according to claim 9, wherein the method further comprises :

using measured locations of the marks on the substrate on the first substrate table and the measured locations of the marks on the second substrate table to generate radial basis functions for the difference between a substrate on the first and second substrate table; and

,

calculating model parameters of the difference between a substrate on the first or second substrate table in said apparatus using the generated radial basis functions as a basis function across said substrate.

12. The method according to claim 1, wherein the apparatus is located in a factory comprising first and second apparatus with first and second substrate locations, the method comprising:

measuring locations of marks on the substrate on the first and second substrate locations;

using measured locations of the marks on the substrate on the first substrate locations and the measured locations of the marks on the second substrate location to generate radial basis functions for the difference between a substrate on the first or second substrate location; and

,

calculating model parameters of the difference between a substrate on the first or second substrate location in said factory using the generated radial basis functions as a basis function across said substrate.

13. A lithographic apparatus arranged to perform a lithographic process across a substrate and to control the lithographic process, said apparatus comprising a processor which is configured and arranged to:

receive measurement locations of marks on the substrate in the lithographic apparatus;

use measured mark locations to generate radial basis functions;

calculate model parameters of said substrate in said lithographic apparatus using said radial basis functions as a basis function across said substrate; and

,

control the lithographic process by said lithographic apparatus using said model parameters.

15. The apparatus according to claim 13, wherein said radial basis function is a Gaussian basis function, an inverse basis function, a multiquadratic basis function, an inverse quadratic basis function, a spline degree k basis function or a thin plate spline basis function.

14. An apparatus arranged to control lithographic processing by a lithographic apparatus and to perform a lithographic process across a substrate, said apparatus comprising a processor which is configured and arranged to:

receive measurement locations of marks on the substrate in said apparatus;

use measured mark locations to generate radial basis functions;

calculate model parameters of said substrate in said apparatus using said radial basis functions as a basis function across said substrate; and

,

control the lithographic process by said lithographic apparatus using said model parameters.