METHOD OF FORMING A HYBRID SPLIT GATE SIMICONDUCTOR
First Claim
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1. A method comprising:
- forming a plurality of first trenches in a semiconductor substrate to a first depth;
forming a plurality of second trenches in said semiconductor substrate to a second depth;
wherein said plurality of first trenches are parallel with said plurality of second trenches, andwherein further trenches of said plurality of first trenches alternate with and are adjacent to trenches of said plurality of second trenches.
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Abstract
Method of forming a Hybrid Split Gate Semiconductor. In accordance with a method embodiment of the present invention, a plurality of first trenches is formed in a semiconductor substrate to a first depth. A plurality of second trenches is formed in the semiconductor substrate to a second depth. The first plurality of trenches are parallel with the second plurality of trenches. The trenches of the plurality of first trenches alternate with and are adjacent to trenches of the plurality of second trenches.
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Citations
20 Claims
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1. A method comprising:
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forming a plurality of first trenches in a semiconductor substrate to a first depth; forming a plurality of second trenches in said semiconductor substrate to a second depth; wherein said plurality of first trenches are parallel with said plurality of second trenches, and wherein further trenches of said plurality of first trenches alternate with and are adjacent to trenches of said plurality of second trenches. - View Dependent Claims (2, 3, 4, 5, 6, 7, 14)
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8. A method comprising:
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forming a plurality of trenches in a semiconductor substrate to a first depth, wherein trenches of said plurality of trenches are parallel to one another; masking alternate trenches of said plurality of trenches; and increasing the depth of unmasked trenches of said plurality of trenches to a second depth. - View Dependent Claims (9, 10, 11, 12, 13)
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15. A method comprising:
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forming a vertical trench metal oxide semiconductor field effect transistor (MOSFET) device comprising a plurality of parallel filled-trench structures, wherein said parallel filled-trench structures are spaced at a pitch distance of 0.6 microns or less, and wherein each of said parallel filled-trench structures comprise a gate structure of said MOSFET. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification