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FLOW MONITORED PARTICLE SENSOR

  • US 20120222495A1
  • Filed: 08/24/2010
  • Published: 09/06/2012
  • Est. Priority Date: 08/24/2009
  • Status: Active Grant
First Claim
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1. A method of monitoring flow rate of a gas in a particle sensor, said method comprising the steps of:

  • providing a particle sensor comprising;

    a flow measurement orifice comprising a differential pressure sensor for measuring differential pressure across said flow measurement orifice;

    a critical orifice;

    a vacuum system for generating gas flow across said flow measurement orifice and said critical orifice;

    generating a flow of gas through said particle sensor by establishing a vacuum pressure at a position downstream of said critical orifice;

    determining a pressure drop (DPI) across said flow measurement orifice;

    determining atmospheric pressure (API);

    determining a pressure in said particle sensor (BPI) at a position that is upstream of said critical orifice; and

    identifying a flow condition from said DPI, API and BPI values;

    thereby monitoring said flow rate in said particle counter.

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