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SHOWER HEAD ASSEMBLY AND THIN FILM DEPOSITION APPARATUS COMPRISING SAME

  • US 20120222616A1
  • Filed: 09/13/2010
  • Published: 09/06/2012
  • Est. Priority Date: 11/18/2009
  • Status: Abandoned Application
First Claim
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1. A showerhead assembly comprising:

  • a plurality of gas injection units radially disposed above a substrate, each of the plurality of gas injection units comprising a receiving part configured to receive a gas supplied from the outside and a plurality of injection holes configured to inject the gas within the receiving part,wherein at least one gas injection unit of the plurality of gas injection units comprises;

    the receiving part defined therein;

    a showerhead body comprising a first inlet configured to supply a first gas into the receiving part and a second inlet configured to supply a second gas into the receiving part, the showerhead body comprising a plurality of first injection holes and a plurality of second injection holes in a bottom part thereof, wherein the first and second injection holes pass through the bottom part;

    a partition plate having a flat plate shape and comprising a plurality of insertion holes passing therethrough, the partition plate being disposed facing the bottom plate of the showerhead body in the receiving part of the showerhead body to divide the receiving part into a first buffer part communicating with the first inlet and a second buffer part communicating with the second inlet;

    a plurality of injection pins, each having a hollow shape, each of the plurality of injection pines comprising one end connected to the insertion hole and the other end connected to the first injection hole; and

    a power source configured to apply a power to generate plasma within the receiving part of the showerhead body,wherein the first gas is supplied into the first buffer part and injected onto the substrate through the injection pins, and the second gas is supplied into the second buffer part and injected onto the substrate through the second injection holes.

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