SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC DEVICE INCLUDING THE SEMICONDUCTOR DEVICE
First Claim
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1. A transistor comprising:
- a channel layer,the channel layer including a plurality of unit layers spaced apart from each other in a vertical direction, andeach of the plurality of unit layers including a plurality of unit channels spaced apart from each other in a horizontal direction;
a source arranged laterally on one side of the channel layer;
a drain arranged laterally on an other side of the channel layer; and
a gate corresponding to the channel layer.
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Abstract
An example embodiment relates to a transistor including a channel layer. A channel layer of the transistor may include a plurality of unit layers spaced apart from each other in a vertical direction. Each of the unit layers may include a plurality of unit channels spaced apart from each other in a horizontal direction. The unit channels in each unit layer may form a stripe pattern. Each of the unit channels may include a plurality of nanostructures. Each nanostructure may have a nanotube or nanowire structure, for example a carbon nanotube (CNT).
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22 Claims
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1. A transistor comprising:
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a channel layer, the channel layer including a plurality of unit layers spaced apart from each other in a vertical direction, and each of the plurality of unit layers including a plurality of unit channels spaced apart from each other in a horizontal direction; a source arranged laterally on one side of the channel layer; a drain arranged laterally on an other side of the channel layer; and a gate corresponding to the channel layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A diode comprising:
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a first layer connected to a second layer, the first layer including a plurality of unit layers spaced apart from each other in a vertical direction, and each of the plurality of unit layers including a plurality of semiconductor elements spaced apart from each other in a horizontal direction. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification