Substrate Assembly Carrier Using Electrostatic Force

• US 20120227886A1
• Filed: 03/10/2011
• Published: 09/13/2012
• Est. Priority Date: 03/10/2011
• Status: Abandoned Application

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Hsiao, Yi-Li, Yu, Chen-Hua, Liu, Chung-Shi, Hwang, Chien Ling, Huang, Ying-Jui
• Application Number:
  US13/045,365
• Publication Number:
  US 20120227886A1
• Time in Patent Office: Days
• US Class Current: 156/60
• CPC Class Codes: H01L 21/67346 characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means
• CPC Class Codes: Y10T 29/49998 Work holding

Abstract

A portable electrostatic chuck carrier includes a holder having a dielectric top surface, and bipolar electrodes under the dielectric top surface. The bipolar electrodes includes positive electrodes and negative electrodes electrically insulated from the positive electrodes. The positive electrodes and the negative electrodes are allocated in an alternating pattern in a plane substantially parallel to the dielectric top surface.

Claims

1. A device comprising:

a portable electrostatic chuck carrier comprising;

a holder comprising a dielectric top surface; and

bipolar electrodes under the dielectric top surface, wherein the bipolar electrodes comprise positive electrodes and negative electrodes electrically insulated from the positive electrodes, and wherein the positive electrodes and the negative electrodes are allocated in an alternating pattern in a plane substantially parallel to the dielectric top surface.

2. The device of claim 1, wherein the portable electrostatic chuck carrier is fully sealed, and comprises an inductor for wirelessly receiving power into the portable electrostatic chuck carrier.

3. The device of claim 2, wherein the portable electrostatic chuck carrier further comprises signal receptors configured to receive external signals from outside the portable electrostatic chuck carrier, and wherein the portable electrostatic chuck carrier is configured to charge and discharge the bipolar electrodes in response to the external signals.

4. The device of claim 3, wherein the portable electrostatic chuck carrier further comprises an embedded rechargeable battery configured to activate the step of charging and discharging the bipolar electrodes in response to the external signals.

5. The device of claim 1, wherein the portable electrostatic chuck carrier further comprises pin jacks connected to the bipolar electrodes, and wherein the device further comprises:

a charge station configured to provide charges to the bipolar electrodes, wherein the charge station comprises pins fitting the pin jacks; and

a discharge station configured to discharge charges from the bipolar electrodes.

6. The device of claim 5, wherein the pin jacks comprise a positive pin jack connected to the positive electrodes, a negative pin jack connected to the negative electrodes, and a ground pin jack connected to an electrical ground.

7. A device comprising:

an electrostatic chuck carrier configured to chuck a dielectric component on a top surface of the electrostatic chuck carrier, wherein the electrostatic chuck carrier comprises;

a fully sealed holder comprising a dielectric top surface;

electrodes under the dielectric top surface and allocated in a plane substantially parallel to the dielectric top surface; and

a wireless power receiver configured to receive power into the electrostatic chuck carrier wirelessly.

8. The device of claim 7, wherein the electrodes comprise bipolar electrodes comprising positive electrodes and negative electrodes electrically insulated from positive electrodes, and wherein the positive electrodes and negative electrodes are allocated in an alternating pattern.

9. The device of claim 7, wherein the wireless power receiver comprises an inductor configured to form a transformer with an external inductor, and wherein the power is received through the transformer.

10. The device of claim 7, wherein the electrostatic chuck carrier further comprises a signal receptor configured to receive an external signal from outside the electrostatic chuck carrier, and wherein the electrostatic chuck carrier is configured to charge and discharge the electrodes in response to the external signal.

11. The device of claim 10, wherein the signal receptor comprises an optical signal receptor.

12. The device of claim 10, wherein the signal receptor comprises an electromagnetic signal receptor.

13. The device of claim 10, wherein the electrostatic chuck carrier further comprises an embedded rechargeable battery connected to the wireless power receiver.

14. A method comprising:

loading a dielectric-containing component on an electrostatic chuck carrier;

charging the electrostatic chuck carrier to chuck the dielectric-containing component onto the electrostatic chuck carrier;

transporting the electrostatic chuck carrier and the dielectric-containing component chucked on the electrostatic chuck carrier as an integrated unit; and

discharging the electrostatic chuck carrier to de-chuck the dielectric-containing component from the electrostatic chuck carrier.

15. The method of claim 14, wherein the dielectric-containing component comprises a laminate substrate, and wherein the method further comprises, at a time the dielectric-containing component is chucked on the electrostatic chuck carrier, bonding a die onto the laminate substrate.

16. The method of claim 15 further comprising reflowing solder bumps between the die and the laminate substrate, wherein during the step of reflowing, the dielectric-containing component is chucked onto the electrostatic chuck carrier.

17. The method of claim 14, wherein the step of charging the electrostatic chuck carrier comprises:

inserting pins into the electrostatic chuck carrier; and

providing charges to electrodes in the electrostatic chuck carrier through the pins.

18. The method of claim 14, wherein the step of charging the electrostatic chuck carrier comprises wirelessly providing power into the electrostatic chuck carrier to charge electrodes in the electrostatic chuck carrier.

19. The method of claim 18 further comprising providing a signal into the electrostatic chuck carrier to activate the step of charging, wherein the signal is received through a receiver selected from the group consisting essentially of an electromagnetic signal receptor and an optical signal receptor.

20. The method of claim 18 further comprising wirelessly providing power and an activation signal into the electrostatic chuck carrier to discharge electrodes in the electrostatic chuck carrier.