METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETRIC MEASURING DEVICE
First Claim
1. A method of measuring an actual shape of an optical surface of a test object, comprising:
- providing an interferometric measuring device generating a measurement wave,arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different regions of the optical surface are illuminated by the measurement wave,measuring the positional coordinates of the measuring device at the different measurement positions in relation to the test object,obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, anddetermining the actual shape of the optical surface by computationally combining the sub-surface measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions.
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Abstract
Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the sub-surface measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement positions.
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Citations
23 Claims
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1. A method of measuring an actual shape of an optical surface of a test object, comprising:
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providing an interferometric measuring device generating a measurement wave, arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different regions of the optical surface are illuminated by the measurement wave, measuring the positional coordinates of the measuring device at the different measurement positions in relation to the test object, obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, and determining the actual shape of the optical surface by computationally combining the sub-surface measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An interferometric measuring device configured for measuring a shape of an optical surface of a test object, comprising:
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a detection apparatus configured to record an interferogram, and imaging optics comprising at least one curved mirror and configured to image the optical surface onto the detection apparatus. - View Dependent Claims (12, 13, 14)
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15. A method of qualifying a wave shaping element having a wave shaping surface configured for adapting the wave front of a test wave to a target shape of an optical test surface, which qualification method comprises:
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consecutively irradiating different regions of the wave shaping surface by the measurement wave, for each irradiated region measuring the wavefront of the measurement wave after interaction of the measurement wave with the respective region of the wave shaping surface, computationally combining the measured wavefronts, and analyzing the combined wavefront and thereby determining deviations of the wave shaping effect of the wave shaping surface from a target wave shaping effect. - View Dependent Claims (16, 17, 18, 19)
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- 20. An optical element having an optical surface, which optical surface is adapted to a non-spherical target shape, such that variations of the actual shape of the optical surface with respect to the target shape having a spatial wavelength between 0.015 mm and 2 mm are limited to at most 100 pm RMS.
Specification