MANUFACTURING METHOD OF THIN FILM TRANSISTOR
First Claim
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1. A manufacturing method of a thin film transistor, comprising:
- providing a substrate;
forming a gate electrode on the substrate;
forming a gate insulating layer on the substrate;
forming a patterned oxide semiconductor layer on the substrate;
forming a source electrode and a drain electrode on the substrate; and
executing a localized laser treatment, the localized laser treatment employing a laser beam to irradiate at least a part of the patterned oxide semiconductor layer, wherein an electrical resistitivity of the patterned oxide semiconductor layer irradiated by the laser beam is lower than an electrical resistitivity of the patterned oxide semiconductor layer without being irradiated by the laser beam, and at least a part of the patterned oxide semiconductor layer irradiated by the laser beam contacts the source electrode or the drain electrode.
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Abstract
A manufacturing method of thin film transistors is provided. The manufacturing method includes: providing a substrate; forming a gate electrode; forming a gate insulating layer; forming a patterned oxide semiconductor layer; forming a source electrode and a drain electrode; and executing a localized laser treatment. A laser beam is used to irradiate at least a part of the patterned oxide semiconductor layer in the localized laser treatment. An electrical resistitivity of the patterned oxide semiconductor layer irradiated by the laser beam is lower than an electrical resistitivity of the patterned oxide semiconductor layer without being irradiated by the laser beam.
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10 Claims
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1. A manufacturing method of a thin film transistor, comprising:
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providing a substrate; forming a gate electrode on the substrate; forming a gate insulating layer on the substrate; forming a patterned oxide semiconductor layer on the substrate; forming a source electrode and a drain electrode on the substrate; and executing a localized laser treatment, the localized laser treatment employing a laser beam to irradiate at least a part of the patterned oxide semiconductor layer, wherein an electrical resistitivity of the patterned oxide semiconductor layer irradiated by the laser beam is lower than an electrical resistitivity of the patterned oxide semiconductor layer without being irradiated by the laser beam, and at least a part of the patterned oxide semiconductor layer irradiated by the laser beam contacts the source electrode or the drain electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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