Instrumented Platform For Vibration Sensitive Equipment

• US 20120235013A1
• Filed: 05/23/2012
• Published: 09/20/2012
• Est. Priority Date: 10/24/2003
• Status: Active Grant

• Current Assignee: Newport Corporation (MKS Instruments Incorporated)
• Original Assignee: Newport Corporation (MKS Instruments Incorporated)
• Inventors: Ryaboy, Vyacheslav M., Booth, Warren
• Granted Patent: US 8,807,515 B2
• Time in Patent Office: Days
• US Class Current: 248/550
• CPC Class Codes: A47B 13/08 Table tops; Rims therefor not restricted to table tops A47B95/04
• CPC Class Codes: A47B 2037/005 Tables specially adapted for laboratories
• CPC Class Codes: A47B 37/00 Tables adapted for other particular purposes glass cutting tables C03B33/03
• CPC Class Codes: F16F 15/002 characterised by the control method or circuitry control of mechanical oscillations per se G05D19/00
• CPC Class Codes: F16F 15/005 using electro- or magnetostrictive actuation means generating of mechanical vibrations operating with electrostriction B06B1/06, with magnetostriction B06B1/08; vehicle suspension arrangements characterised by use of piezoelectric elements B60G17/01941; piezoelectric, electrostrictive and magnetostrictive devices per se H10N30/00
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: F16F 7/1011 by electromagnetic means
• CPC Class Codes: F16M 11/18 with mechanism for moving the apparatus relatively to the stand
• CPC Class Codes: G01H 13/00 Measuring resonant frequency

Abstract

A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.

Claims

1. A platform assembly that supports a vibration-sensitive payload, comprising:

a table that has a first surface coupled to the vibration-sensitive payload, a second surface, and an inner core located between said first and second surfaces; and

,

a vibration sensor located within said inner core.

2. The assembly of claim 1, wherein said first surface extends along a first plate and said vibration sensor is attached to said first plate.

3. The assembly of claim 1, further comprising an electrical connector attached to an external surface of said table and coupled to said vibration sensor.

4. The assembly of claim 1, further comprising a damper located within said inner core.

5. The assembly of claim 4, wherein said damper includes an active actuator that is coupled to said vibration sensor.

6. The assembly of claim 5, further comprising a control circuit coupled to said vibration sensor and said active actuator.

7. The assembly of claim 1, further comprising a monitor coupled to said vibration sensor.

8. The assembly of claim 1, further comprising a honeycomb core within said inner core.

9. The assembly of claim 6, wherein said control circuit causes said active actuator to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of said first surface.

10. The assembly of claim 1, wherein said vibration sensor includes a wireless transmitter.

11. A platform assembly that supports a vibration-sensitive payload, comprising:

a table that has a first surface coupled to the vibration-sensitive payload, a second surface and an inner core located between said first and second surfaces; and

,

vibration sensor means for sensing a vibration of said first surface.

12. The assembly of claim 11, wherein said first surface extends along a first plate and said vibration sensor means includes a vibration sensor attached to said first plate.

13. The assembly of claim 11, further comprising an electrical connector attached to an external surface of said table and coupled to said vibration sensor means.

14. The assembly of claim 11, further comprising a damper located within said inner core.

15. The assembly of claim 14, wherein said damper includes an active actuator that is coupled said vibration sensor means.

16. The assembly of claim 15, further comprising a control circuit coupled to said vibration sensor and said active actuator.

17. The assembly of claim 11, further comprising a monitor coupled to said vibration sensor means.

18. The assembly of claim 11, further comprising a honeycomb core within said inner core.

19. The assembly of claim 16, wherein said control circuit causes said active actuator to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of said first surface.

20. The assembly of claim 11, wherein said vibration sensor means includes a wireless transmitter.

21. A method for sensing a vibration of a vibration-sensitive payload coupled to a first surface of a platform table, comprising:

sensing the vibration with a vibration sensor location within an inner core of a platform table.

22. The method of claim 21, further comprising transmitting output signals from the vibration sensor to an external monitor.

23. The method of claim 22, wherein the output signals are transmitted through a cable and an electrical connector attached to the platform table.

24. The method of claim 21, wherein the first surface of the platform table is damped with an active actuator located within the inner core.

25. The method of claim 24, wherein the active actuator creates an active force that emulates an effect of viscous damper in a frequency domain that encompasses a plurality of natural frequencies of a flexural vibration of the first surface of the platform table.