SENSOR WITH ENERGY-HARVESTING DEVICE

• US 20120235647A1
• Filed: 03/14/2011
• Published: 09/20/2012
• Est. Priority Date: 03/14/2011
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: HUANG, Hsin-Ting, TSAI, Shang-Ying, CHUNG, Tien-Kan, TAI, Wen-Chuan, HUANG, Yao-Te, YANG, Chang-Yi, HUNG, Chia-Ming
• Granted Patent: US 8,723,343 B2
• Time in Patent Office: Days
• US Class Current: 322/3
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: G01P 15/11 by inductive pick-up
• CPC Class Codes: H01F 5/003 Printed circuit coils
• CPC Class Codes: H02K 15/00 Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
• CPC Class Codes: H02K 35/04 with moving coil systems and stationary magnets
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: Y10T 29/49009 Dynamoelectric machine

Abstract

In some embodiments of the present disclosure, a sensor comprises a substrate, a sensor element and an energy-harvesting device. The sensor element comprises a plate, and the plate is moveable with respect to the substrate. The energy-harvesting device is formed on the plate of the sensor element.

Claims

1. A device comprising:

a substrate;

a sensor element connected to the substrate and comprising a plate, the plate moveable with respect to the substrate; and

an energy-harvesting device, the energy-harvesting device formed on the plate of the sensor element.

2. The device according to claim 1, the energy-harvesting device comprising a coil formed on the plate.

3. The device according to claim 2, further comprising a permanent magnet positioned to cause a magnetic field to pass through the coil.

4. The device according to claim 1, further comprising a controller, adapted to use at least a portion of energy harvested by the energy harvesting device to power the device.

5. The device according to claim 1, the energy-harvesting device adapted to harvesting energy using a resonant mode of the plate.

6. The device according to claim 1, the sensor element being a magnetic field sensor.

7. The device according to claim 6, the sensor element being a Lorentz force magnetic field sensor with capacitive detection responsive to motion of the plate.

8. The device according to claim 1, the sensor element being a motion sensor.

9. The device according to claim 1, the sensor element being a motion sensor with capacitive detection responsive to motion of the plate.

10. A system comprising:

a substrate;

a plate moveable with respect to the substrate, the moveable plate adapted to move in response to an environment variable;

an energy harvesting device formed on the moveable plate; and

a controller adapted to power the sensor system using at least a portion of energy harvested by the energy-harvesting device.

11. The system according to claim 10, the moveable plate formed on the substrate and the controller formed on the same substrate.

12. The system according to claim 11, the moveable plate formed over the controller.

13. The system according to claim 10, further comprising elastic connections connecting the moveable plate to the substrate and the energy harvesting device comprising a spiral coil formed on the moveable plate connected to the controller via the elastic connections.

14. The system according to claim 13, further comprising a permanent magnet positioned to cause a magnetic field to pass through the spiral coil.

15. The system according to claim 10, the energy-harvesting device adapted to harvest energy using a resonant mode of the moveable plate.

16. The system according to claim 10, further comprising electrodes for capacitive detection responsive to a motion of the moveable plate.

17. The system according to claim 16, the moveable plate further comprising a wire loop and forming a magnetic field sensor.

18. The system according to claim 16, the moveable plate further comprising fingers extending from the moveable plate, between the electrodes, the moveable plate and electrode forming a motion sensor.

19. A method of fabricating a device comprising:

forming a moveable plate over a substrate;

forming an energy harvesting coil in the moveable plate; and

forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate.

20. The method according to claim 19, further comprising:

forming at least one of springs or hinges to attach the moveable plate to the substrate; and

forming wiring connecting the energy-harvesting coil to at least one of bond pads or a control circuit formed on the substrate.