LADAR USING MEMS SCANNING
First Claim
Patent Images
1. A scanning mirror system comprising:
- a substrate patterned to include a mirror area, a frame around the mirror area, and a base around the frame;
a first actuator coupled such that operation of the first actuator rotates the mirror area about a first axis relative to the frame; and
a second actuator coupled such that operation of the second actuator rotates the frame about a second axis relative to the base.
2 Assignments
0 Petitions
Accused Products
Abstract
A scanning mirror includes a substrate that is patterned to include a mirror area, a frame around the mirror area, and a base around the frame. A set of actuators operate to rotate the mirror area about a first axis relative to the frame, and a second set of actuators rotate the frame about a second axis relative to the base. The scanning mirror can be fabricated using semiconductor processing techniques or processing methods that do not require clean room process. Drivers for the scanning mirror may employ feedback loops that operate the mirror for triangular motions. Some embodiments of the scanning mirror can be used in a LADAR system for a Natural User Interface of a computing system.
153 Citations
18 Claims
-
1. A scanning mirror system comprising:
-
a substrate patterned to include a mirror area, a frame around the mirror area, and a base around the frame; a first actuator coupled such that operation of the first actuator rotates the mirror area about a first axis relative to the frame; and a second actuator coupled such that operation of the second actuator rotates the frame about a second axis relative to the base. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. A LADAR system comprising:
-
a MEMS mirror containing a mirror mounted for scanning rotations about a first axis and about a second axis; and a driver system coupled to drive the mirror for continuous oscillations providing scanning about the first axis at a first frequency and about the second axis at a second frequency that is lower than the first frequency. - View Dependent Claims (14, 15)
-
-
16. An NUI system, comprising:
-
a LADAR module; and a computer system coupled to receive from the LADAR module, spatial measurements of an environment including a user, wherein the computer system contains a module that when executed interprets the spatial measurements to identify instructions from the user for control of the computer system. - View Dependent Claims (17, 18)
-
Specification