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FLUID DISTRIBUTION MEMBERS AND/OR ASSEMBLIES

  • US 20120237696A1
  • Filed: 03/18/2011
  • Published: 09/20/2012
  • Est. Priority Date: 03/18/2011
  • Status: Active Grant
First Claim
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1. A fluid distribution member assembly for use in a substrate processing system, comprising:

  • a fluid distribution member having a central portion and a perimeter portion, wherein the fluid distribution member defines at least one slot formed there-through, and wherein the at least one slot extends along a non-radial path configured to allow the central portion to expand and rotate with respect to the perimeter portion.

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