FAILURE DIAGNOSIS SUPPORT TECHNIQUE
First Claim
1. A computer-readable, non-transitory storage medium storing a program for causing a computer to execute a procedure comprising:
- calculating a first expected value of the number of failures for each combination of a feature of a plurality of features that are failure factors and a first group of a plurality of first groups regarding classification elements of first semiconductor devices for which a failure is analyzed and second semiconductors on which a same circuit as the first semiconductors is implemented, from first data for each of the plurality of first groups and a predetermined expression, wherein the first data includes the number of actual failures occurred in the first group and first feature values of the plurality of features; and
calculating, for each of the plurality of features, a first indicator value representing similarity between a distribution of the first expected values over the plurality of first groups and a distribution of the numbers of actual failures over the plurality of first groups, from the first expected value for each combination of the feature and the first group and the number of actual failures for each of the plurality of first groups.
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Abstract
The disclosed method includes: calculating a first expected value of the number of failures for each combination of a feature that is a failure factor and a first group regarding classification elements of first semiconductor devices for which a failure is analyzed and second semiconductors on which a same circuit as the first semiconductors is implemented, from first data for each first group and a predetermined expression, wherein the first data includes the number of actual failures occurred in the first group and first feature values of features; and calculating, for each feature, a first indicator value representing similarity between a distribution of the first expected values over the first groups and a distribution of the numbers of actual failures over the first groups, from the first expected value for each combination of the feature and the first group and the number of actual failures for each first group.
23 Citations
12 Claims
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1. A computer-readable, non-transitory storage medium storing a program for causing a computer to execute a procedure comprising:
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calculating a first expected value of the number of failures for each combination of a feature of a plurality of features that are failure factors and a first group of a plurality of first groups regarding classification elements of first semiconductor devices for which a failure is analyzed and second semiconductors on which a same circuit as the first semiconductors is implemented, from first data for each of the plurality of first groups and a predetermined expression, wherein the first data includes the number of actual failures occurred in the first group and first feature values of the plurality of features; and calculating, for each of the plurality of features, a first indicator value representing similarity between a distribution of the first expected values over the plurality of first groups and a distribution of the numbers of actual failures over the plurality of first groups, from the first expected value for each combination of the feature and the first group and the number of actual failures for each of the plurality of first groups. - View Dependent Claims (2, 3, 4)
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5. A failure diagnosis support method comprising:
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calculating, by using a computer, a first expected value of the number of failures for each combination of a feature of a plurality of features that are failure factors and a first group of a plurality of first groups regarding classification elements of first semiconductor devices for which a failure is analyzed and second semiconductors on which a same circuit as the first semiconductors is implemented, from first data for each of the plurality of first groups and a predetermined expression, wherein the first data includes the number of actual failures occurred in the first group and first feature values of the plurality of features; and calculating, by using the computer, for each of the plurality of features, a first indicator value representing similarity between a distribution of the first expected values over the plurality of first groups and a distribution of the numbers of actual failures over the plurality of first groups, from the first expected value for each combination of the feature and the first group and the number of actual failures for each of the plurality of first groups. - View Dependent Claims (6, 7, 8)
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9. A failure diagnosis support apparatus comprising:
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a memory; a processing unit using the memory and configured to execute a procedure; calculating a first expected value of the number of failures for each combination of a feature of a plurality of features that are failure factors and a first group of a plurality of first groups regarding classification elements of first semiconductor devices for which a failure is analyzed and second semiconductors on which a same circuit as the first semiconductors is implemented, from first data for each of the plurality of first groups and a predetermined expression, wherein the first data includes the number of actual failures occurred in the first group and first feature values of the plurality of features; and calculating, for each of the plurality of features, a first indicator value representing similarity between a distribution of the first expected values over the plurality of first groups and a distribution of the numbers of actual failures over the plurality of first groups, from the first expected value for each combination of the feature and the first group and the number of actual failures for each of the plurality of first groups. - View Dependent Claims (10, 11, 12)
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Specification