METHOD OF DEPOSITING ZINC OXIDE COATINGS BY CHEMICAL VAPOR DEPOSITION
First Claim
1. A chemical vapor deposition process for depositing a zinc oxide coating comprising:
- providing a glass substrate at a temperature above 1112°
F. (600°
C.);
providing a coating apparatus above the glass substrate, wherein the coating apparatus comprises two or more separate flow pathways, each flow pathway providing communication between an inlet opening and an outlet opening, and one or more flow conditioners disposed in each of the flow pathways;
providing gaseous precursor compounds including a gaseous zinc-containing compound, a gaseous oxygen-containing compound, and a gaseous acetonate compound and one or more inert gases;
introducing the gaseous precursor compounds and the one or more inert gases as two or more streams into the inlet openings;
directing the streams through the two or more separate flow pathways; and
discharging the streams from the outlet openings of the coating apparatus, wherein mixing of the gaseous precursor compounds and one or more inert gases occurs to form a zinc oxide coating on a surface of the glass substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
A chemical vapor deposition process for depositing zinc oxide coatings is provided. The process includes providing a glass substrate and a coating apparatus. The coating apparatus includes two or more separate flow pathways. Each flow pathway provides communication between an inlet opening and an outlet opening, and one or more flow conditioners disposed in each of the flow pathways. Gaseous precursor compounds are provided. The gaseous precursor compounds and the one or more inert gases are introduced as two or more streams into the inlet openings. The streams are directed through the two or more separate flow pathways and discharged from the outlet openings of the coating apparatus. The gaseous precursor compounds and one or more inert gases mix to form a zinc oxide coating on a surface of the glass substrate.
-
Citations
20 Claims
-
1. A chemical vapor deposition process for depositing a zinc oxide coating comprising:
-
providing a glass substrate at a temperature above 1112°
F. (600°
C.);providing a coating apparatus above the glass substrate, wherein the coating apparatus comprises two or more separate flow pathways, each flow pathway providing communication between an inlet opening and an outlet opening, and one or more flow conditioners disposed in each of the flow pathways; providing gaseous precursor compounds including a gaseous zinc-containing compound, a gaseous oxygen-containing compound, and a gaseous acetonate compound and one or more inert gases; introducing the gaseous precursor compounds and the one or more inert gases as two or more streams into the inlet openings; directing the streams through the two or more separate flow pathways; and discharging the streams from the outlet openings of the coating apparatus, wherein mixing of the gaseous precursor compounds and one or more inert gases occurs to form a zinc oxide coating on a surface of the glass substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
-
-
19. A chemical vapor deposition process for depositing a zinc oxide coating comprising:
-
providing a moving heated glass substrate supported on a bath of molten metal in a float glass manufacturing process and at essentially atmospheric pressure; providing a coating apparatus at, at least, one predetermined location in the float bath chamber, and at a predetermined distance above the moving heated glass substrate; providing a source of a gaseous zinc-containing compound, a gaseous oxygen-containing compound, one or more inert gases, and gaseous acetyl acetonate; introducing a gaseous stream comprising the gaseous zinc-containing compound into a first flow pathway in the coating apparatus; introducing a gaseous stream comprising the gaseous oxygen-containing compound into a second flow pathway in the coating apparatus; introducing a gaseous stream comprising the one or more inert gases into a third flow pathway in the coating apparatus; introducing the gaseous acetyl acetonate into a flow pathway in the coating apparatus; maintaining the streams of gaseous compounds/inert gases separate while each flows through a flow conditioner at a predetermined flow velocity to increase the laminarity of each gaseous stream; and discharging the separate streams of gaseous compounds/inert gases from each flow conditioner, wherein mixing of the separate streams of gaseous compounds/inert gases occurs to form a pyrolytic zinc oxide coating on a surface of the glass substrate. - View Dependent Claims (20)
-
Specification