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METHOD OF DEPOSITING ZINC OXIDE COATINGS BY CHEMICAL VAPOR DEPOSITION

  • US 20120240634A1
  • Filed: 03/22/2012
  • Published: 09/27/2012
  • Est. Priority Date: 03/23/2011
  • Status: Abandoned Application
First Claim
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1. A chemical vapor deposition process for depositing a zinc oxide coating comprising:

  • providing a glass substrate at a temperature above 1112°

    F. (600°

    C.);

    providing a coating apparatus above the glass substrate, wherein the coating apparatus comprises two or more separate flow pathways, each flow pathway providing communication between an inlet opening and an outlet opening, and one or more flow conditioners disposed in each of the flow pathways;

    providing gaseous precursor compounds including a gaseous zinc-containing compound, a gaseous oxygen-containing compound, and a gaseous acetonate compound and one or more inert gases;

    introducing the gaseous precursor compounds and the one or more inert gases as two or more streams into the inlet openings;

    directing the streams through the two or more separate flow pathways; and

    discharging the streams from the outlet openings of the coating apparatus, wherein mixing of the gaseous precursor compounds and one or more inert gases occurs to form a zinc oxide coating on a surface of the glass substrate.

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