METHOD AND APPARATUS FOR CUTTING A SUBSTRATE
First Claim
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1. A substrate cutting apparatus for cutting a large size substrate into smaller unit substrates, the apparatus comprising:
- a rotating table on which the large size substrate having formed thereon a plurality of cutting lines is mountable, the rotating table including rotating shafts at locations corresponding to the cutting lines; and
a push plate that fixes a position of the large size substrate on the rotating table.
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Abstract
A substrate cutting apparatus for cutting a large size substrate into smaller unit substrates includes a rotating table and a push plate. The rotating table, on which the large size substrate having formed thereon a plurality of cutting lines is mountable, includes rotating shafts at locations corresponding to the cutting lines. The push plate fixes a position of the large size substrate on the rotating table.
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Citations
15 Claims
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1. A substrate cutting apparatus for cutting a large size substrate into smaller unit substrates, the apparatus comprising:
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a rotating table on which the large size substrate having formed thereon a plurality of cutting lines is mountable, the rotating table including rotating shafts at locations corresponding to the cutting lines; and a push plate that fixes a position of the large size substrate on the rotating table. - View Dependent Claims (2, 3, 4, 5)
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6. A method of cutting a substrate, the method comprising:
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performing a scribing operation to form a plurality of cutting lines on a large size substrate according to a size of a plurality of smaller unit substrates to be formed; performing a fixing operation for fixing the large size substrate, on which the cutting lines are formed, to a rotating table, the rotating table having a plurality of rotating shafts corresponding to the cutting lines; and performing a cutting operation for cutting the plurality of smaller unit substrates from the large size substrate along the cutting lines by rotating the rotating table around the plurality of rotating shafts. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification