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DIELECTRIC SPACER FOR DISPLAY DEVICES

  • US 20120242638A1
  • Filed: 03/24/2011
  • Published: 09/27/2012
  • Est. Priority Date: 03/24/2011
  • Status: Abandoned Application
First Claim
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1. An electromechanical device package, comprising:

  • a substrate;

    a plurality of anchor regions disposed on the substrate, wherein the anchor regions include raised spacers;

    a plurality of electromechanical devices formed on the substrate, wherein the electromechanical devices are formed over the raised spacers and anchored to the substrate at the anchor regions; and

    a backplate sealed to the substrate to form a package, wherein the highest points of the electromechanical devices above the substrate are above the raised spacers.

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