INTERFEROMETRIC DISTANCE MEASUREMENT DEVICE
First Claim
1. An interferometric distance measurement device, comprising:
- a light source that emits a beam of light;
a scanning unit comprising a scanning plate, which includes a splitter that splits the beam of light into at least a measurement beam and a reference beam, wherein said reference beam is propagated solely within said scanning plate before reaching interferential superposition with said measurement beam at a unification site;
a reflector, spaced apart from said scanning unit, which is acted upon by said measurement beam, wherein said reflector is embodied such that said measurement beam striking said reflector undergoes retroreflection in at least one direction, so that said reference beam and said measurement beam maintain their relative propagation directions, regardless of any possible relative tilting of said scanning unit and of said reflector downstream of said unification site; and
a detector arrangement by way of which at least one distance signal relating to a distance between said scanning plate and said reflector is detectable from said measurement beam and said reference beam interfering with one another.
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Accused Products
Abstract
An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having-a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.
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Citations
15 Claims
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1. An interferometric distance measurement device, comprising:
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a light source that emits a beam of light; a scanning unit comprising a scanning plate, which includes a splitter that splits the beam of light into at least a measurement beam and a reference beam, wherein said reference beam is propagated solely within said scanning plate before reaching interferential superposition with said measurement beam at a unification site; a reflector, spaced apart from said scanning unit, which is acted upon by said measurement beam, wherein said reflector is embodied such that said measurement beam striking said reflector undergoes retroreflection in at least one direction, so that said reference beam and said measurement beam maintain their relative propagation directions, regardless of any possible relative tilting of said scanning unit and of said reflector downstream of said unification site; and a detector arrangement by way of which at least one distance signal relating to a distance between said scanning plate and said reflector is detectable from said measurement beam and said reference beam interfering with one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification