Design-Based Inspection Using Repeating Structures
First Claim
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1. A computer-implemented method for inspecting a wafer, comprising:
- identifying multiple instances of structures in a design for a wafer, wherein the structures have the same or substantially the same geometrical characteristics, and wherein said identifying is performed using design data for the design;
comparing output of an inspection system generated for two or more of the multiple instances formed on the wafer to each other, wherein the two or more of the multiple instances are located within the same die on the wafer; and
detecting defects on the wafer based on results of said comparing, wherein said identifying, said comparing, and said detecting are performed using a computer system.
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Abstract
Systems and methods for design-based inspection using repeating structures are provided.
13 Citations
19 Claims
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1. A computer-implemented method for inspecting a wafer, comprising:
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identifying multiple instances of structures in a design for a wafer, wherein the structures have the same or substantially the same geometrical characteristics, and wherein said identifying is performed using design data for the design; comparing output of an inspection system generated for two or more of the multiple instances formed on the wafer to each other, wherein the two or more of the multiple instances are located within the same die on the wafer; and detecting defects on the wafer based on results of said comparing, wherein said identifying, said comparing, and said detecting are performed using a computer system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A non-transitory computer-readable medium storing program instructions executable on a computer system for performing a computer-implemented method for inspecting a wafer, wherein the computer-implemented method comprises:
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identifying multiple instances of structures in a design for a wafer, wherein the structures have the same or substantially the same geometrical characteristics, and wherein said identifying is performed using design data for the design; comparing output of an inspection system generated for two or more of the multiple instances formed on the wafer to each other, wherein the two or more of the multiple instances are located within the same die on the wafer; and detecting defects on the wafer based on results of said comparing.
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19. A system configured to inspect a wafer, comprising:
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an inspection subsystem configured to generate output for a wafer; and a computer subsystem configured for; identifying multiple instances of structures in a design for the wafer, wherein the structures have the same or substantially the same geometrical characteristics, and wherein said identifying is performed using design data for the design; comparing output of the inspection subs stem generated for two or more of the multiple instances formed on the wafer to each other, wherein the two or more of the multiple instances are located within the same die on the wafer; and detecting defects on the wafer based on results of said comparing.
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Specification