MEMS DEVICE AND MANUFACTURING PROCESS THEREOF
First Claim
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1. A MEMS device comprising:
- a first substrate comprising at least a first circuit disposed on a surface of the first substrate;
a second substrate having a first surface and a second surface, the second substrate comprising;
a MEMS component disposed on the surface of the first substrate with the first surface facing towards the first substrate, and electrically connected with the first circuit;
a conducting part electrically isolated from the MEMS component, and electrically connected with the first circuit; and
a second circuit disposed on the second surface of the MEMS component, electrically isolated from the MEMS component, and electrically connected with the first circuit via the conducting part;
a third substrate having a recessed region and a plurality of standoff structures, disposed over the second substrate, and connecting to the first substrate with the standoff structures such that the second substrate is enclosed in the recessed region.
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Abstract
A manufacturing process of a MEMS device divides a substrate for fabricating a MEMS component into two electrically isolated regions, so that the MEMS component and the circuit disposed on its surface could connect electrically with another substrate below respectively through the corresponding conducing regions, whereby the configuration of the electrical conducting paths and the manufacturing process are simplified. A MEMS device manufactured by using the aforementioned process is also disclosed herein.
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Citations
29 Claims
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1. A MEMS device comprising:
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a first substrate comprising at least a first circuit disposed on a surface of the first substrate; a second substrate having a first surface and a second surface, the second substrate comprising; a MEMS component disposed on the surface of the first substrate with the first surface facing towards the first substrate, and electrically connected with the first circuit; a conducting part electrically isolated from the MEMS component, and electrically connected with the first circuit; and a second circuit disposed on the second surface of the MEMS component, electrically isolated from the MEMS component, and electrically connected with the first circuit via the conducting part; a third substrate having a recessed region and a plurality of standoff structures, disposed over the second substrate, and connecting to the first substrate with the standoff structures such that the second substrate is enclosed in the recessed region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A manufacturing process of a MEMS device, comprising:
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providing a first substrate comprising at least one first circuit disposed on a surface of the first substrate; providing a second substrate having a first surface and a second surface; disposing the second substrate on the surface of the first substrate with the first surface facing towards the first substrate; dividing the second substrate into a component region and a conducting part, wherein the component region and the conducting part are electrically isolated from each other and are respectively electrically connected with the first circuit; forming a conductive layer on the second surface of the second substrate; patterning the conductive layer so as to form a second circuit; forming a MEMS component in the component region of the second substrate; providing a third substrate having a recessed region and a plurality of standoff structures; and disposing the third substrate over the second substrate, and connecting the standoff structures and the first substrate such that the second substrate is enclosed in the recessed region. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification