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NON-LOCKING SUBSTRATE SUPPORT SYSTEM

  • US 20120256070A1
  • Filed: 04/11/2012
  • Published: 10/11/2012
  • Est. Priority Date: 04/11/2011
  • Status: Abandoned Application
First Claim
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1. A non-locking substrate support system, comprising:

  • a plurality of support pins;

    a tunnel for each pin, the tunnel allowing each pin to travel; and

    a base member, each pin configured to travel between an upper surface of the substrate support system and the base member.

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