CHARGED PARTICLE BEAM ANALYZER AND ANALYSIS METHOD
First Claim
1. A charged particle beam analyzer irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample,wherein two or more X-ray lenses configured in different manners are provided in the vacuum container.
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Abstract
In a charged particle beam analyzer irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample, two or more X-ray lenses configured in different manners are provided in the vacuum container. This no longer requires air opening in the vacuum container following X-ray lens replacement and also no longer requires vacuuming, making it possible to perform analysis with high efficiency and high sensitivity.
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Citations
18 Claims
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1. A charged particle beam analyzer irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample,
wherein two or more X-ray lenses configured in different manners are provided in the vacuum container.
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14. A charged particle beam analysis method of irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample,
wherein two or more X-ray lenses configured in different manners are provided in the vacuum container, and the analysis is performed by use of the X-ray lens in accordance with an energy of the X-ray.
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15. A charged particle radiation analysis method of irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample,
wherein two or more X-ray lenses configured in different manners and a plurality of diffraction gratings dividing the X-ray are included in the vacuum container, and the analysis is performed through a combination of the X-ray lens and the diffraction grating in accordance with an energy of the X-ray.
Specification