SENSING DEVICE AND MANUFACTURING METHOD THEREOF

• US 20120260747A1
• Filed: 06/06/2011
• Published: 10/18/2012
• Est. Priority Date: 04/15/2011
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Chen, Lung-Tai, Hsu, Yu-Wen, Ho, Tzong-Che, Pan, Li-Chi
• Granted Patent: US 8,763,457 B2
• Time in Patent Office: Days
• US Class Current: 73/863
• CPC Class Codes: B81C 1/00293 maintaining a controlled atmosphere with processes not provided for in B81C1/00285
• CPC Class Codes: B81C 2203/0118 Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
• CPC Class Codes: G01D 11/245 Housings for sensors
• CPC Class Codes: G01L 19/0092 Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature G01L9/025, G01L9/045, G01L9/065, G01L9/085, G01L9/105, G01L9/125, G01L19/02, G01L19/04 take precedence; measuring two or more variable G01D21/02; temperature sensors with pressure compensation G01K1/26
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: H01L 23/315 the encapsulation having a cavity
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A sensing device can be provided with sealed and open-type chambers in various conditions for accommodating different types of sensing structural components by stacking multiple substrates, wherein the condition of a sealed chamber depends on condition taken in substrate bonding process. Owing to sealing a channel of the sealed chamber by the substrate, superior sealing performance is achieved as compared to those adopting solder or sealing material, and thus the condition of the sealed chamber can be finely controlled.

Claims

1. A sensing device, comprising:

a first substrate, having a carrying surface;

a second substrate, having a first surface and a second surface opposing to the first surface, the second substrate being attached to the carrying surface of the first substrate through the first surface, and a plurality of chambers being included between the second substrate and the first substrate, the second substrate sealing a first chamber of the plurality of chambers, and the second substrate having at least one channel connecting one of the remaining chambers to the second surface; and

a plurality of sensing elements, respectively disposed within the chambers.

2. The sensing device as claimed in claim 1, wherein the first chamber comprises an environmental condition of atmospheric air under specific pressure, or gas in specific pressure and specific composition, or vacuum pressure.

3. The sensing device as claimed in claim 1, wherein the sensing element within the first chamber comprises an accelerometer, a radio frequency switch, a quartz crystal, an oscillator, a reference pressure gauge or a gyroscope.

4. The sensing device as claimed in claim 1, wherein the second substrate has a plurality of concaved portions on the first surface, the chambers are formed between the concaved portions and the carrying surface.

5. The sensing device as claimed in claim 1, wherein the first substrate has a plurality of concaved portions on the carrying surface, the chambers are formed between the concaved portions and the first surface.

6. The sensing device as claimed in claim 1, further comprising a second cover plate disposed on the second surface of the second substrate, the at least one channel comprising a first channel connecting a second chamber of the plurality of chambers, the second cover plate covering the first channel to seal the second chamber.

7. The sensing device as claimed in claim 6, wherein an environmental condition within the first chamber is different from an environmental condition within the second chamber, and the first chamber or the second chamber comprises an environmental condition of atmospheric air under specific pressure, or gas in specific pressure and specific composition, or vacuum pressure.

8. The sensing device as claimed in claim 7, wherein the sensing element within the first chamber or the second chamber comprises an accelerometer, a radio frequency switch, a quartz crystal, an oscillator, a reference pressure gauge or a gyroscope.

9. The sensing device as claimed in claim 1, further comprising a second cover plate, disposed on the second surface of the second substrate, the at least one channel comprising a first channel connected to the second chamber of the plurality of chambers and a second channel connected to a third chamber of the plurality of chambers, the second cover plate covering the first channel to seal the second chamber, and the second cover plate having a third channel passing through the second cover plate and being connected to the second channel and the third chamber.

10. The sensing device as claimed in claim 9, wherein an environmental condition within the first chamber is different from an environmental condition within the second chamber, and the first chamber or the second chamber comprises an environmental condition of atmospheric air under specific pressure, or gas in specific pressure and specific composition, or vacuum pressure.

11. The sensing device as claimed in claim 10, wherein the sensing element within the first chamber or the second chamber comprises an accelerometer, a radio frequency switch, a quartz crystal, an oscillator, a reference pressure gauge or a gyroscope.

12. The sensing device as claimed in claim 9, wherein an environment condition within the third chamber is the same as a condition of external environment.

13. The sensing device as claimed in claim 12, wherein the sensing element within the third chamber comprises a pressure gauge, a hygrometer, a gas sensor, an image sensor or a photo sensor.

14. The sensing device as claimed in claim 1, further comprising:

a fourth substrate, disposed on the second surface of the second substrate, the at least one channel comprising a first channel, a second channel and a third channel, the first channel, the second channel and the third channel being respectively connected to a second chamber, a third chamber and a fourth chamber of the plurality of chambers, the fourth substrate covering the first channel to seal the second chamber, the fourth substrate having a fourth channel and a fifth channel both passing through the fourth substrate, the fourth channel being connected to the second channel and the third chamber, and the fifth channel being connected the third channel and the fourth chamber; and

a second cover plate, disposed on the fourth substrate, the second cover plate covering the fourth channel of the fourth substrate to seal the third chamber, and the second cover plate having a sixth channel passing through the second cover plate and being connected to the fifth channel and the fourth chamber.

15. The sensing device as claimed in claim 14, wherein an environmental condition within the first chamber, an environmental condition within the second chamber and an environmental condition within the third chamber are different from one another, and the first chamber, the second chamber or the third chamber comprises an environmental condition of atmospheric air under specific pressure, or gas in specific pressure and specific composition, or vacuum pressure.

16. The sensing device as claimed in claim 15, wherein the sensing element within the first chamber, the second chamber or the third chamber comprises an accelerometer, a radio frequency switch, a quartz crystal, an oscillator, a reference pressure gauge or a gyroscope.

17. The sensing device as claimed in claim 14, wherein an environment condition within the fourth chamber is the same as a condition of external environment.

18. The sensing device as claimed in claim 17, wherein the sensing element within the fourth chamber comprises a pressure gauge, a hygrometer, a gas sensor, an image sensor or a photo sensor.

19. The sensing device as claimed in claim 1, wherein the second substrate comprising a third substrate and a first cover plate, the first cover plate being stacked on the third substrate.

20. The sensing device as claimed in claim 19, wherein the third substrate comprises a plurality of through holes for forming the plurality of chambers.

21. A sensing device, comprising:

a first substrate, having a carrying surface;

a second substrate, having a first surface and a second surface opposing to the first surface, the second substrate being attached to the carrying surface of the first substrate through the first surface, and at least one chamber being included between the second substrate and the first substrate, and the second substrate having a channel connecting the chamber to the second surface; and

a second cover plate, attached to the second surface of the second substrate, the second cover plate covering the channel to seal the chamber; and

a sensing element, disposed within the chamber.

22. The sensing device as claimed in claim 21, wherein the chamber comprises an environmental condition of atmospheric air under specific pressure, or gas in specific pressure and specific composition, or vacuum pressure.

23. The sensing device as claimed in claim 21, wherein the second substrate comprising a third substrate and a first cover plate, the first cover plate being stacked on the third substrate.

24. The sensing device as claimed in claim 23, wherein the third substrate comprises at least one through hole for forming the at least one chamber.