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Out-of-Plane Spacer Defined Electrode

  • US 20120261822A1
  • Filed: 09/14/2011
  • Published: 10/18/2012
  • Est. Priority Date: 04/14/2011
  • Status: Active Grant
First Claim
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1. A method of forming an out-of-plane electrode comprising:

  • providing an oxide layer above an upper surface of a device layer;

    providing a first cap layer portion above an upper surface of the oxide layer;

    etching a first electrode perimeter defining trench extending through the first cap layer portion and stopping at the oxide layer;

    depositing a first material portion within the first electrode perimeter defining trench;

    depositing a second cap layer portion above the deposited first material portion;

    vapor releasing a portion of the oxide layer;

    depositing a third cap layer portion above the second cap layer portion;

    etching a second electrode perimeter defining trench extending through the second cap layer portion and the third cap layer portion; and

    depositing a second material portion within the second electrode perimeter defining trench, such that a spacer including the first material portion and the second material portion define a perimeter of an out-of-plane electrode.

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