Radio Frequency Power Delivery System
First Claim
1. A hybrid system for delivering power to a load, comprising;
- a power converter system;
an outer loop coupled to the power converter system that provides a gain-bandwidth and a phase margin for substantially maintaining stability of output power; and
an inner loop coupled to the power converter system for compensating for nonlinearities in the power converter system.
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Accused Products
Abstract
A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
100 Citations
17 Claims
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1. A hybrid system for delivering power to a load, comprising;
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a power converter system; an outer loop coupled to the power converter system that provides a gain-bandwidth and a phase margin for substantially maintaining stability of output power; and an inner loop coupled to the power converter system for compensating for nonlinearities in the power converter system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A digital and analog hybrid method for delivering power to a load, comprising:
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providing a gain-bandwidth and a phase margin for substantially maintaining stability of an output power; and compensating for nonlinearities in the in the output power. - View Dependent Claims (13, 14, 15)
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16. A digital and analog hybrid system for delivering power to a load, comprising:
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means for providing a gain-bandwidth and a phase margin for substantially maintaining stability of output power; and means for compensating for nonlinearities at the load.
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17. A method for delivering power to a dynamic plasma load, comprising:
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determining a switch of reactant gases that generate a plasma; calculating a change in output power required to sustain a plasma load with the switched reactant gases; supplying power equal to a power required to sustain the plasma load with the switched reactant gases; and supplying power to the plasma load faster than the reactant gases change in the plasma.
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Specification