SUBSTRATE HOLDERS AND METHODS OF SUBSTRATE MOUNTING

• US 20120263569A1
• Filed: 04/13/2012
• Published: 10/18/2012
• Est. Priority Date: 04/14/2011
• Status: Abandoned Application

• Current Assignee: Veeco Instruments Incorporated
• Original Assignee: Veeco Instruments Incorporated
• Inventors: Priddy, Scott Wayne, Bresnahan, Richard Charles
• Application Number:
  US13/446,270
• Publication Number:
  US 20120263569A1
• Time in Patent Office: Days
• US Class Current: 414/800
• CPC Class Codes: C23C 14/50 Substrate holders
• CPC Class Codes: C23C 16/4582 Rigid and flat substrates, e.g. plates or discs C23C16/4581 takes precedence
• CPC Class Codes: C30B 23/02 Epitaxial-layer growth
• CPC Class Codes: C30B 25/12 Substrate holders or susceptors

Abstract

A substrate holder for holding a semiconductor substrate for processing in a molecular beam epitaxy system, the substrate including a front side, an opposite backside for epitaxial growth, and an outer edge extending between the front side and the backside, the substrate holder including a body comprising a central opening extending from a backside to a top side of the body, an inner ring surrounding the central opening, and a substrate support lip extending from the inner ring into the central opening, and at least one tensioning device operatively attached to the body and including a cam member and a spring in contact with a portion of the cam member, wherein the spring has a elongated portion and at least two contact portions extending from opposite ends of the elongated portion for contacting the outer edge of the substrate.

Claims

1. A substrate holder for holding a semiconductor substrate for processing in a molecular beam epitaxy system, the substrate including a front side for epitaxial growth, an opposite backside, and an outer edge extending between the front side and the backside, the substrate holder comprising:

a body comprising a central opening extending from a backside to a top side of the body, an inner ring surrounding the central opening, and a substrate support lip extending from the inner ring into the central opening;

at least one tensioning device operatively attached to the body and comprising a cam member and a spring in contact with a portion of the cam member, wherein the spring comprises an elongated portion having opposite ends and a contact portion extending from each of the opposite ends of the elongated portion for contacting the outer edge of the substrate.

2. The substrate holder of claim 1, further comprising a backing ring support lip spaced from the substrate support lip and extending from the inner ring into the central opening.

3. The substrate holder of claim 2, further comprising a backing ring adjacent to and at least partially overlapping the backing ring support lip.

4. The substrate holder of claim 2, wherein the backing ring support lip comprises at least two notches, and wherein each of the two contact portions of one of the springs is positioned within one of the notches of the backing ring support lip when the tensioning device is in an unloaded configuration.

5. The substrate holder of claim 4, wherein the backing ring comprises an inner circumferential surface, and wherein neither of the contact portions extends past the inner circumferential surface when the tensioning device is in an unloaded configuration.

6. The substrate holder of claim 1, wherein the cam member comprises:

a first body portion comprising a top surface, a bottom surface, and an outer peripheral surface;

a second body portion extending from the bottom surface of the first body portion and comprising;

a notch extending from its periphery and toward a central longitudinal axis of the cam member; and

an eccentric outer surface.

7. The substrate holder of claim 6, wherein the tensioning device comprises an unloaded configuration in which the elongated portion of the spring is in contact with the eccentric outer surface, and a loaded configuration in which the elongated portion of the spring is positioned within the notch of the second body portion.

8. The substrate holder of claim 7, wherein the body further comprises at least one opening through its backside, and wherein each of the tensioning devices is positioned so that its cam member is located in one of the openings through the backside of the body.

9. The substrate holder of claim 8, wherein each cam member is rotatable relative to its respective opening through the backside of the body.

10. The substrate holder of claim 1, comprising at least three tensioning devices spaced from each other around the inner ring of the body.

11. The substrate holder of claim 1, in combination with a platen that comprises at least a second additional substrate holder that comprises a second central opening, a second inner ring, and a second support lip extending from the second inner ring toward the second central opening, the platen comprising at least one tensioning device operatively attached to the second additional substrate holder and comprising a cam member and a spring.

12. A substrate holder for holding a semiconductor substrate for processing in a molecular beam epitaxy system, the substrate including a front side for epitaxial growth, an opposite backside, and an outer edge extending between the front side and the backside, the substrate holder comprising:

a body comprising a central opening extending from a backside to a top side of the body, and an inner ring surrounding the central opening, and a substrate support lip extending from the inner ring into the central opening;

at least one tensioning device operatively attached to the body and comprising a cam member and a spring in contact with a portion of the cam member, wherein the spring comprises a elongated portion, at least two contact portions, each of which extends from one of the opposite ends of the elongated portion for contacting the outer edge of the substrate, and at least two support portions, each of which extends from a distal end of one of the contact portions for supporting the front side of the substrate.

13. The substrate holder of claim 12, wherein the tensioning device comprises an unloaded configuration in which the elongated portion of the spring is in contact with the eccentric outer surface, and a loaded configuration in which the elongated portion of the spring is positioned within the notch of the second body portion.

14. A method of loading a substrate into a substrate holder that comprises a body comprising a central opening extending from a backside to a top side of the body, an inner ring surrounding the central opening, and a substrate support lip extending from the inner ring into the central opening, and at least one tensioning device operatively attached to the body and comprising a cam member and a spring in contact with a portion of the cam member, wherein the spring comprises a elongated portion and a contact portion extending from each of the opposite ends of the elongated portion for contacting the outer edge of the substrate, the method comprising the steps of:

placing a substrate into the central opening of the body from the backside of the body with the at least one tensioning member in an unloaded condition;

manipulating the at least one tensioning device to move it to its loaded condition in which the contact portions of the spring are in contact with an outer edge of the substrate.

15. The method of claim 14, wherein the step of manipulating the at least one tensioning device comprises rotating the cam member relative to the backside of the body to move the tensioning device from its unloaded condition to its loaded condition.