ENERGY HARVESTING DEVICE INCLUDING MEMS COMPOSITE TRANSDUCER
First Claim
1. An energy harvesting device comprising:
- a MEMS composite transducer comprising;
a substrate, portions of the substrate defining an outer boundary of a cavity;
a MEMS transducing member including a beam having a first end and a second end, the first end being anchored to the substrate and the second end being cantilevered over the cavity; and
a compliant membrane positioned in contact with the MEMS transducing member, a first portion of the compliant membrane covering the MEMS transducing member, and a second portion of the compliant membrane being anchored to the substrate, the compliant member being configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.
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Abstract
An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.
263 Citations
28 Claims
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1. An energy harvesting device comprising:
a MEMS composite transducer comprising; a substrate, portions of the substrate defining an outer boundary of a cavity; a MEMS transducing member including a beam having a first end and a second end, the first end being anchored to the substrate and the second end being cantilevered over the cavity; and a compliant membrane positioned in contact with the MEMS transducing member, a first portion of the compliant membrane covering the MEMS transducing member, and a second portion of the compliant membrane being anchored to the substrate, the compliant member being configured to be set into oscillation by excitations produced externally relative to the energy harvesting device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
- 23. The energy harvesting device of claim I, the compliant membrane having a first side in contact with the MEMS transducing member and a second side opposite the first side, the energy harvesting device further comprising a mass affixed to the first side of the compliant membrane.
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25. An energy harvesting apparatus comprising:
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an energy harvesting device comprising; a MEMS composite transducer comprising; a substrate, portions of the substrate defining an outer boundary of a cavity; a MEMS transducing member including a beam having a first end and a second end, the first end being anchored to the substrate and the second end being cantilevered over the cavity; and a compliant membrane positioned in contact with the MEMS transducing member, a first portion of the compliant membrane covering the MEMS transducing member, and a second portion of the compliant membrane being anchored to the substrate, the compliant member being configured to be set into oscillation by excitations produced externally relative to the energy harvesting device; a rectifier; and an energy storage device. - View Dependent Claims (26, 27, 28)
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Specification