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ENERGY HARVESTING DEVICE INCLUDING MEMS COMPOSITE TRANSDUCER

  • US 20120267900A1
  • Filed: 04/19/2011
  • Published: 10/25/2012
  • Est. Priority Date: 04/19/2011
  • Status: Active Grant
First Claim
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1. An energy harvesting device comprising:

  • a MEMS composite transducer comprising;

    a substrate, portions of the substrate defining an outer boundary of a cavity;

    a MEMS transducing member including a beam having a first end and a second end, the first end being anchored to the substrate and the second end being cantilevered over the cavity; and

    a compliant membrane positioned in contact with the MEMS transducing member, a first portion of the compliant membrane covering the MEMS transducing member, and a second portion of the compliant membrane being anchored to the substrate, the compliant member being configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.

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