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NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS

  • US 20120272742A1
  • Filed: 07/13/2010
  • Published: 11/01/2012
  • Est. Priority Date: 07/17/2009
  • Status: Active Grant
First Claim
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1. A nano electro-mechanical system (NEMS), comprising:

  • a fixed part associated with substrate,a moveable part, moveable in relation to the substrate, anda transduction component comprising an electrically conductive material, which comprises an AlSi alloy based deposition,wherein the transduction component is capable of exciting the movable part to move the moveable part, to detect a movement of the movable part, or both, andthe AlSi alloy based deposition is supported at least in part by the movable part.

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