NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS
First Claim
1. A nano electro-mechanical system (NEMS), comprising:
- a fixed part associated with substrate,a moveable part, moveable in relation to the substrate, anda transduction component comprising an electrically conductive material, which comprises an AlSi alloy based deposition,wherein the transduction component is capable of exciting the movable part to move the moveable part, to detect a movement of the movable part, or both, andthe AlSi alloy based deposition is supported at least in part by the movable part.
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Accused Products
Abstract
The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.
17 Citations
15 Claims
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1. A nano electro-mechanical system (NEMS), comprising:
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a fixed part associated with substrate, a moveable part, moveable in relation to the substrate, and a transduction component comprising an electrically conductive material, which comprises an AlSi alloy based deposition, wherein the transduction component is capable of exciting the movable part to move the moveable part, to detect a movement of the movable part, or both, and the AlSi alloy based deposition is supported at least in part by the movable part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification