MEMS RESONATOR, SENSOR HAVING THE SAME AND MANUFACUTRING METHOD FOR MEMS RESONATOR

• US 20120279302A1
• Filed: 05/04/2011
• Published: 11/08/2012
• Est. Priority Date: 04/08/2011
• Status: Active Grant

• Current Assignee: Agency For Defense Development (Government of The Republic of China)
• Original Assignee: Agency For Defense Development (Government of The Republic of China)
• Inventors: Lee, Sangwoo, Lim, Geunbae, An, Taechang, Kim, Jinyoung, Sung, Jungwoo
• Granted Patent: US 9,032,795 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: B81B 2201/0271 Resonators; ultrasonic resonators
• CPC Class Codes: B81C 1/00682 Treatments for improving mechanical properties, not provided for in B81C1/00658 - B81C1/0065
• CPC Class Codes: G01C 19/5783 Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: H03H 3/0072 of microelectro-mechanical resonators or networks micromembranes or microbeams B81B2203/01; manufacture of microstructural devices in general B81C
• CPC Class Codes: H03H 9/02338 Suspension means
• CPC Class Codes: H03H 9/2457 Clamped-free beam resonators
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled.

Claims

1. A microelectromechanical system (MEMS) resonator comprising:

a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof;

an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated within an empty space of the recess portion; and

a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator.

2. The resonator of claim 1, wherein a thin film is deposited on the one surface of the base substrate,

wherein the oscillator extends from the thin film.

3. The resonator of claim 2, wherein first and second metal layers are formed at one surfaces of the thin film and the oscillator, respectively,

wherein the wire allows the first and second metal layers to be connected to each other.

4. The resonator of claim 3, wherein the wire is formed by dielectrophoresis using the first and second metal layers as electrodes.

5. The resonator of claim 4, wherein the wire contains nanoparticles, the nanoparticles being stuck onto the first and second metal layers by the dielectrophoresis.

6. The resonator of claim 3, wherein the first and second metal layers are disposed at structures, the structures protruding from the thin film and the oscillator into the empty space, respectively.

7. The resonator of claim 3, wherein the first and second metal layers are disposed to face each other.

8. The resonator of claim 1, wherein the wire is cut in response to a voltage being applied.

9. The resonator of claim 1, wherein the oscillator is implemented as a cantilever having a fixed end connected to the base substrate and a free end extending from the recess portion, or implemented as a fixed beam having both ends connected to the base substrate by crossing the recess portion.

10. A sensor comprising:

a sensor main body;

a microelectromechanical system (MEMS) resonator mounted in the main body, having an oscillator, and configured according to claim 1; and

a controller configured to detect a displacement of the oscillator to thus measure an acceleration or an angular rate.

11. A method for manufacturing a microelectromechanical system (MEMS) resonator having an oscillator extending from a base substrate, the manufacturing method comprising:

manufacturing the MEMS resonator having first and second electrode layers at the base substrate and the oscillator, respectively;

filling a solution between the first and second electrode layers, the solution mixed with nanoparticles; and

forming a wire connecting the base substrate and the oscillator to each other by supplying power to the first and second electrode layers, thus to control the natural frequency of the MEMS resonator by supporting at least part of the oscillator.

12. The method of claim 11, wherein the manufacturing step comprises:

depositing a thin film on the base substrate;

etching the thin film to form preset patterns;

depositing the first and second metal layers on the pattern-formed thin film; and

forming the oscillator by etching the base substrate.

13. The method of claim 11, wherein the solution is mixed with monomers of a polymer.

14. The method of claim 11, wherein the nanoparticle contains at least one of carbon nano tube, fullerene, gold nanoparticle and silver nanoparticle.

15. The method of claim 11, further comprising cutting the wire by applying a voltage to the wire to restore the natural frequency of the MEMS resonator.