Mask Frame Assembly for Thin Film Deposition and Method of Manufacturing the Same

• US 20120279444A1
• Filed: 09/22/2011
• Published: 11/08/2012
• Est. Priority Date: 05/06/2011
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Mobile Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Hong, Jeremy
• Granted Patent: US 10,344,376 B2
• Time in Patent Office: Days
• US Class Current: 118/504
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 16/042 using masks
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A mask frame assembly may be constructed with a supporting bar and a plurality of stick-type split masks installed on a frame while crossing each other. The supporting bar and the split masks are fixed to each other by being welded to each other at points where the supporting bar and the plurality of split masks cross, and a partial cutting portion is formed around each of the welding points by cutting portions of the split masks. By using the supporting bar, the split masks are prevented from drooping, and adhesion between the split masks and a substrate is enhanced.

Claims

1. A mask frame assembly for thin film deposition, comprising:

a frame having an opening portion;

a supporting bar installed on the frame and across the opening portion; and

a plurality of split masks installed on the frame across the opening portion so as to cross the supporting bar;

wherein two end portions of each split mask are fixed to the frame and said each split mask is fixed to the supporting bar at a point where said each split mask and the supporting bar cross; and

wherein a partial cutting portion is formed around each said point where said each split mask is fixed to the supporting bar by cutting portions of said each split mask.

2. The mask frame assembly of claim 1, wherein a plurality of deposition patterns are formed in the plurality of split masks;

and

wherein the split masks and the supporting bar cross each other at points between the plurality of deposition patterns.

3. The mask frame assembly of claim 1, wherein a plurality of the supporting bars are installed in parallel with each other on the frame.

4. The mask frame assembly of claim 1, wherein said each split mask and the supporting bar are fixed to each other by forming a welding point by spot welding at said point where said each split mask and the supporting bar cross, and a pair of the partial cutting portions are formed symmetrically with respect to the welding point.

5. The mask frame assembly of claim 4, wherein the pair of the partial cutting portions are cut in parallel with each other and toward an inner portion from an outer portion of said each split mask.

6. The mask frame assembly of claim 4, wherein the pair of the partial cutting portions are cut so that the pair of the partial cutting portions converges into an inner portion from an outer portion of said each split mask.

7. The mask frame assembly of claim 4, wherein the pair of the partial cutting portions are cut so that the pair of the partial cutting portions diverges toward an inner portion from an outer portion of said each split mask.

8. The mask frame assembly of claim 1, wherein said each split mask and the supporting bar are fixed to each other by forming a welding point by spot welding at said point where said each split mask and the supporting bar cross, and the partial cutting potion has a U-shape which surrounds the welding point.

9. A method of manufacturing a mask frame assembly for thin film deposition, the method comprising the steps of:

preparing a frame on which a supporting bar is installed across an opening portion of the frame;

preparing a plurality of split masks which are installed on the frame and which cross the supporting bar;

forming a partial cutting portion around each point where each split mask and the supporting bar are to cross by cutting a portion of said each split mask;

fixing two end portions of said each split mask to the frame; and

fixing said each split mask to the supporting bar at a point where said each split mask and the supporting bar cross.

10. The method of claim 9, further comprising the steps of:

forming a deposition pattern in said each split mask; and

installing said each split mask and the supporting bar so as to cross each other at a point between the deposition pattern.

11. The method of claim 9, wherein a plurality of supporting bars are installed in parallel with each other on the frame.

12. The method of claim 9, wherein said each split mask and the supporting bar are fixed to each other by forming a welding point by spot welding at said point where said each split mask and the supporting bar cross, and a pair of the partial cutting portions are formed symmetrically with respect to the welding point.

13. The method of claim 12, wherein the pair of the partial cutting portions are cut in parallel with each other and toward an inner portion from an outer portion of said each split mask.

14. The method of claim 12, wherein the pair of the partial cutting portions are cut so that the pair of the partial cutting portions converges into an inner portion from an outer portion of said each split mask.

15. The method of claim 12, wherein the pair of the partial cutting portions are cut so that the pair of the partial cutting portions diverges toward an inner portion from an outer portion of said each split mask.

16. The method of claim 9, wherein said each split mask and the supporting bar are fixed to each other by forming a welding point by spot welding at said point where said each split mask and the supporting bar cross, and the partial cutting portion has a U-shape which surrounds the welding point.