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MEMS DEVICE WITH IMPACTING STRUCTURE FOR ENHANCED RESISTANCE TO STICTION

  • US 20120280591A1
  • Filed: 05/05/2011
  • Published: 11/08/2012
  • Est. Priority Date: 05/05/2011
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems (MEMS) device comprising:

  • a substrate;

    a movable element suspended above said substrate and adapted for motion relative to said substrate; and

    a secondary structure coupled to said movable element and suspended above said substrate, said secondary structure being adapted to impact said movable element in response to said motion of said movable element.

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