ELECTROSTATIC CHUCK HAVING A PLURALITY OF HEATER COILS

• US 20120285619A1
• Filed: 07/23/2012
• Published: 11/15/2012
• Est. Priority Date: 04/27/2006
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Matyushkin, Alexander, Koosau, Dennis, Panagopoulos, Theodoros, Holland, John
• Granted Patent: US 8,663,391 B2
• Time in Patent Office: Days
• US Class Current: 156/345.1
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

An electrostatic chuck for receiving a substrate in a substrate processing chamber comprises a ceramic puck having a substrate receiving surface having a plurality of spaced apart mesas, an opposing backside surface, and central and peripheral portions. A plurality of heat transfer gas conduits traverse the ceramic puck and terminate in ports on the substrate receiving surface to provide heat transfer gas to the substrate receiving surface. An electrode is embedded in the ceramic puck to generate an electrostatic force to retain a substrate placed on the substrate receiving surface. A plurality of heater coils are also embedded in the ceramic puck, the heaters being radially spaced apart and concentric to one another.

Claims

12-1. An assembly according to claim 12 wherein the edge ring comprises a ceramic.