GLASS MICRO FLUIDIC DEVICE

• US 20120288422A1
• Filed: 05/11/2012
• Published: 11/15/2012
• Est. Priority Date: 05/12/2011
• Status: Abandoned Application

• Current Assignee: Silex Microsystems AB (Sai Microelectronics, Inc.)
• Original Assignee: Silex Microsystems AB (Sai Microelectronics, Inc.)
• Inventors: KALVESTEN, Edvard
• Application Number:
  US13/469,377
• Publication Number:
  US 20120288422A1
• Time in Patent Office: Days
• US Class Current: 422/502
• CPC Class Codes: B81B 2201/051 Micromixers, microreactors
• CPC Class Codes: B81B 2203/0338 Channels
• CPC Class Codes: B81C 1/00119 Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: B81C 2203/036 Fusion bonding
• CPC Class Codes: C03B 23/24 Making hollow glass sheets or bricks
• CPC Class Codes: Y10T 428/24562 Interlaminar spaces

Abstract

A method of making a microfluidic device, includes: providing an optically transparent bottom substrate and an optically transparent top substrate, each made of glass. Recesses are made in the top substrate and the top and bottom substrates are bonded together. Then, material is removed from the top substrate to expose the recesses, and a lid is attached to the top substrate so as to cover the recesses whereby channels are formed. At least that surface of the lid facing towards the recesses in the top substrate has a surface roughness of <5 nm, preferably <2 nm. A microfluidic device, including a body of an optically transparent material, and at least one channel extending inside the body, the channels having a bottom surface, a top surface and side walls is also described. The top and bottom surfaces both exhibit surface a roughness <5 nm, preferably <2 nm.

Claims

1. A method of making a microfluidic device, comprising the steps of:

providing an optically transparent bottom substrate (20) made of glass;

providing an optically transparent top substrate (22) made of glass;

making recesses (24) in the top substrate;

bonding the top (22) and bottom (20) substrates together;

removing material from the top substrate to expose the recesses (24);

attaching a lid (29) made of glass to the top substrate (22) so as to cover the recesses (24) whereby channels (28) are formed;

wherein

at least that surface of the lid and that surface of the bottom substrate that face towards the recesses (24) in the top substrate has a surface roughness of <

5 nm, preferably <

2 nm.

2. The method as claimed in claim 1, further comprising making inlets and outlets to and from said channels (28).

3. The method as claimed claim 1, wherein the bonding of the substrates is achieved by bringing pre-prepared extremely clean and planar surfaces in contact and then applying heat and optionally pressure

4. The method as claimed in claim 1, wherein the glass is selected from low-ion glasses or ion-free glass.

5. The method as claimed in claim 2, wherein the bonding of the substrates is achieved by bringing pre-prepared extremely clean and planar surfaces in contact and then applying heat and optionally pressure

6. The method as claimed in claim 2, wherein the glass is selected from low-ion glasses or ion-free glass.

7. The method as claimed in claim 3, wherein the glass is selected from low-ion glasses or ion-free glass.

8. A microfluidic device (30), comprising a body (20, 22, 29) made of glass and at least one channel (28) extending inside said body, said channels having a bottom surface (33b), a top surface (33t) and side walls;

characterized in that the top (33) and bottom surfaces both exhibit a surface roughness <

5 nm, preferably <

2 nm.

9. The device as claimed in claim 8, wherein there is provided at least one inlet (34) and one outlet (35) to and from the channels (28′

, 28″

).

10. The device as claimed in claim 8, comprising a plurality of connected channels forming a channel system with one inlet and one outlet.