INERTIAL SENSOR

• US 20120297874A1
• Filed: 08/19/2011
• Published: 11/29/2012
• Est. Priority Date: 05/26/2011
• Status: Active Grant

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: KIM, Jong Woon, LEE, Jung Won, JEUNG, Won Kyu, PARK, Heung Woo, HAN, Seung Hun, KANG, Yun Sung
• Granted Patent: US 8,701,489 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Abstract

Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.

Claims

1. An inertial sensor, comprising:

a plate-shaped membrane;

a mass body that is provided under a central portion of the membrane and includes an integrated circuit; and

a post that are provided under an edge of the membrane and surround the mass body.

2. The inertial sensor as set forth in claim 1, further comprising:

wirings that are formed on a top portion of the membrane; and

first through holes that penetrate through the membrane to electrically connect one end of the wirings to the integrated circuit.

3. The inertial sensor as set forth in claim 2, further comprising:

second through holes that penetrate through the post to be electrically connected to the other end of the wirings,

wherein the other end of the wirings extends to the edge of the membrane.

4. The inertial sensor as set forth in claim 2, further comprising connectors that are provided between the mass body and the membrane,

wherein the first through holes extend to penetrate through the connectors.

5. The inertial sensor as set forth in claim 4, wherein a cross sectional area of the connector contacting the membrane is smaller than that of the top surface of the mass body.

6. The inertial sensor as set forth in claim 2, further comprising sensing electrodes or driving electrodes that are formed on the membrane to be electrically connected to the other end of the wirings.

7. The inertial sensor as set forth in claim 1, further comprising a bottom cap that is spaced apart from the mass body and is provided at the bottom portion of the post so as to seal the bottom portion of the post.

8. The inertial sensor as set forth in claim 3, further comprising a bottom cap that is spaced apart from the mass body and is provided at the bottom portion of the post so as to seal the bottom portion of the post,

wherein the second through holes extend to penetrate through the bottom cap.