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SCANNING ELECTRON MICROSCOPE

  • US 20120298865A1
  • Filed: 01/21/2011
  • Published: 11/29/2012
  • Est. Priority Date: 01/25/2010
  • Status: Active Grant
First Claim
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1. A scanning electron microscope comprising:

  • an electron source;

    a convergent lens of converging an electron beam emitted from the electron source;

    a deflection coil of scanning the electron beam on a sample;

    a detector of detecting a secondary electron generated from the sample by irradiating the sample with the electron beam; and

    calculating means for calculating a contour of a pattern of a surface of the sample based on an output of the detector;

    wherein the calculating means corrects a contour of the pattern changed by irradiating the sample with the electron beam in accordance with a shape of the pattern.

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