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SINGLE-SHOT FULL-FIELD REFLECTION PHASE MICROSCOPY

  • US 20120307035A1
  • Filed: 01/25/2012
  • Published: 12/06/2012
  • Est. Priority Date: 01/25/2011
  • Status: Active Grant
First Claim
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1. A system for phase measurement comprising:

  • a light source;

    a material to be measured that is positioned to receive light from the light source;

    an optical system that separates a diffraction order of light from the light source; and

    an imaging detector that detects the diffracted order of light from the optical system and light from the material to provide a phase image of the material.

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