INERTIAL SENSOR
First Claim
1. An inertial sensor, comprising:
- a membrane including wiring layers that are partitioned into insulating regions and conducting regions;
a mass body provided under a central portion of the membrane; and
a post provided under an edge of the membrane so as to support the membrane and surrounding the mass body.
1 Assignment
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Accused Products
Abstract
Disclosed herein is an inertial sensor. The inertial sensor 100 according to a preferred embodiment of the present invention includes a membrane including wiring layers that are partitioned into insulating regions and conducting regions, a mass body provided under a central portion of the membrane, and a post provided under an edge of the membrane so as to support the membrane and surrounding the mass body. By this configuration, the membrane is formed as a chief metal core, thereby making it possible to reduce the total manufacturing cost of the inertial sensor and the parasitic capacitance is reduced, thereby making it possible to improve sensitivity of the inertial sensor. Further, the mass body extending from the membrane is made of metals to increase a mass density of the mass body, thereby making it possible to improve the sensitivity of the inertial sensor.
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Citations
12 Claims
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1. An inertial sensor, comprising:
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a membrane including wiring layers that are partitioned into insulating regions and conducting regions; a mass body provided under a central portion of the membrane; and a post provided under an edge of the membrane so as to support the membrane and surrounding the mass body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification