FLEXIBLE PIEZOELECTRIC STRUCTURES AND METHOD OF MAKING SAME
First Claim
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1. A method for fabricating a biocompatible flexible piezoelectric structure, comprising:
- depositing a first piezoelectric film by film deposition on a first substrate;
contacting a biocompatible flexible substrate with the first piezoelectric film; and
separating the first piezoelectric film and biocompatible flexible substrate from the first substrate, the first piezoelectric film remaining attached to the biocompatible flexible substrate.
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Abstract
A flexible piezoelectric structure and a method of making the structure are disclosed. A piezoelectric film having a relatively high piezoelectric coefficient is attached to a flexible substrate. The piezoelectric film is fabricated on a different substrate and transferred to the flexible substrate by contact.
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16 Claims
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1. A method for fabricating a biocompatible flexible piezoelectric structure, comprising:
- depositing a first piezoelectric film by film deposition on a first substrate;
contacting a biocompatible flexible substrate with the first piezoelectric film; and
separating the first piezoelectric film and biocompatible flexible substrate from the first substrate, the first piezoelectric film remaining attached to the biocompatible flexible substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
- depositing a first piezoelectric film by film deposition on a first substrate;
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