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COUPLED MULTI-WAVELENGTH CONFOCAL SYSTEMS FOR DISTANCE MEASUREMENTS

  • US 20120314200A1
  • Filed: 06/09/2011
  • Published: 12/13/2012
  • Est. Priority Date: 06/09/2011
  • Status: Abandoned Application
First Claim
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1. A distance measurement method comprising:

  • imaging a first light source emitting a first wavelength, on a region of a substrate with a dispersive confocal lens;

    imaging a second light source emitting a second wavelength with the dispersive confocal lens on the region of the substrate;

    measuring intensity of light reflection emitted from the first light source;

    measuring intensity of light reflection emitted from the second light source; and

    generating a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance.

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