COUPLED MULTI-WAVELENGTH CONFOCAL SYSTEMS FOR DISTANCE MEASUREMENTS
First Claim
1. A system for measuring a distance to a substrate comprising:
- a first light source, emitting a first wavelength on a region of the substrate through a lens;
a second light source emitting a second wavelength on the region of the substrate through the lens;
wherein the lens is confocal and dispersive;
a first detector configured to detect first wavelength light reflected from the substrate;
a second detector configured to detect second wavelength light reflected from the substrate; and
a processor configured to compute;
a) a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance between the imaging device and substrate;
b) a second response function wherein the second response function represents reflected light intensity emitted from the second light source as a function of the distance between the imaging device and substrate; and
c) a ratio response function wherein the ratio response function represents the ratio of the first response function and the second response function as a function of distance between the imaging device and substrate.
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Abstract
A system for measuring a distance to a substrate includes a first light source, emitting a first wavelength on a region of the substrate though a lens. A second light source emits a second wavelength region of the substrate through the lens. A first and second detector are configured to detect the first and second wavelength light reflected from the substrate. A processor is configured to compute a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance between the imaging device and substrate. A second response function represents reflected light intensity emitted from the second light source as a function of the distance between the imaging device and substrate. A ratio response function represents the ratio of the first and second response function as a function of distance between the imaging device and substrate.
9 Citations
9 Claims
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1. A system for measuring a distance to a substrate comprising:
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a first light source, emitting a first wavelength on a region of the substrate through a lens; a second light source emitting a second wavelength on the region of the substrate through the lens; wherein the lens is confocal and dispersive; a first detector configured to detect first wavelength light reflected from the substrate; a second detector configured to detect second wavelength light reflected from the substrate; and a processor configured to compute; a) a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance between the imaging device and substrate; b) a second response function wherein the second response function represents reflected light intensity emitted from the second light source as a function of the distance between the imaging device and substrate; and c) a ratio response function wherein the ratio response function represents the ratio of the first response function and the second response function as a function of distance between the imaging device and substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification