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COUPLED MULTI-WAVELENGTH CONFOCAL SYSTEMS FOR DISTANCE MEASUREMENTS

  • US 20120316830A1
  • Filed: 06/09/2011
  • Published: 12/13/2012
  • Est. Priority Date: 06/09/2011
  • Status: Abandoned Application
First Claim
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1. A system for measuring a distance to a substrate comprising:

  • a first light source, emitting a first wavelength on a region of the substrate through a lens;

    a second light source emitting a second wavelength on the region of the substrate through the lens;

    wherein the lens is confocal and dispersive;

    a first detector configured to detect first wavelength light reflected from the substrate;

    a second detector configured to detect second wavelength light reflected from the substrate; and

    a processor configured to compute;

    a) a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance between the imaging device and substrate;

    b) a second response function wherein the second response function represents reflected light intensity emitted from the second light source as a function of the distance between the imaging device and substrate; and

    c) a ratio response function wherein the ratio response function represents the ratio of the first response function and the second response function as a function of distance between the imaging device and substrate.

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