Methods and Apparatus for Measuring Analytes Using Large Scale FET Arrays
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Abstract
Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.
101 Citations
127 Claims
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1-106. -106. (canceled)
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107. An integrated circuit sensor for detecting byproducts of a plurality of reactions, comprising:
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a sensor array comprising at least 105 field-effect transistor based sensors, the sensors having a floating gate with an analyte-sensitive layer that provide threshold voltage dependent output signals wherein the trapped charge of each floating gate is such that the threshold voltage is similar for at least some of the sensors in response to detecting substantially the same amount of reaction byproduct; a plurality of reaction chambers for containing separate reactions coupled to the sensor array. - View Dependent Claims (108, 109, 110, 111, 112, 113, 114)
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115. A method for detecting byproducts of a plurality of reactions, comprising:
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providing a sensor array comprising at least 105 field-effect transistor based sensors, the sensors having a floating gate with a chemical-sensitive layer that provide threshold voltage dependent output signals in response to reaction byproducts wherein the trapped charge of each floating gate is such that the threshold voltage is similar for at least some of the sensors in response to detecting substantially the same amount of reaction byproduct; providing a plurality of reaction chambers for containing separate reactions coupled to the sensor array; introducing at least one analyte into at least a portion of the plurality of reaction chambers wherein the analyte undergoes a reaction to generate reaction byproducts; detecting the reaction byproducts through their interaction with the chemical-sensitive layer resulting in the output signals generated by one or more respective sensors; and correlating the presence of the at least one analyte in a respective reaction chamber coupled to a respective sensor. - View Dependent Claims (116, 117, 118, 119, 120, 121, 122, 123)
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124. A sensor for detecting reaction byproducts of a plurality of nucleic acid sequencing reactions, comprising:
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a sensor array comprising a plurality of chemFET sensors each having a floating gate with an analyte-sensitive layer that provides threshold voltage dependent output signals in response to detecting substantially the same amount of reaction byproduct; and a plurality of reaction chambers for containing separate nucleic acid sequencing reactions coupled to the sensor array. - View Dependent Claims (125, 126, 127)
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Specification