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MICROWELL STRUCTURES FOR CHEMICALLY-SENSITIVE SENSOR ARRAYS

  • US 20120326213A1
  • Filed: 08/30/2012
  • Published: 12/27/2012
  • Est. Priority Date: 05/29/2009
  • Status: Abandoned Application
First Claim
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1. A sensor, comprising:

  • an array of chemically-sensitive field effect transistors (chemFETs);

    a dielectric layer over the chemFETs in the array, the dielectric layer defining cavities corresponding to sensing surfaces of the chemFETs; and

    a conformal layer of sensing material within the cavities, the layer of sensing material coupled to the sensing surfaces of the chemFETs and substantially lining sidewalls of the cavities.

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