MICROWELL STRUCTURES FOR CHEMICALLY-SENSITIVE SENSOR ARRAYS
First Claim
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1. A sensor, comprising:
- an array of chemically-sensitive field effect transistors (chemFETs);
a dielectric layer over the chemFETs in the array, the dielectric layer defining cavities corresponding to sensing surfaces of the chemFETs; and
a conformal layer of sensing material within the cavities, the layer of sensing material coupled to the sensing surfaces of the chemFETs and substantially lining sidewalls of the cavities.
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Abstract
Methods and apparatus relating to FET arrays for monitoring chemical and/or biological reactions such as nucleic acid sequencing-by-synthesis reactions. Some methods provided herein relate to improving signal (and also signal to noise ratio) from released hydrogen ions during nucleic acid sequencing reactions.
117 Citations
12 Claims
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1. A sensor, comprising:
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an array of chemically-sensitive field effect transistors (chemFETs); a dielectric layer over the chemFETs in the array, the dielectric layer defining cavities corresponding to sensing surfaces of the chemFETs; and a conformal layer of sensing material within the cavities, the layer of sensing material coupled to the sensing surfaces of the chemFETs and substantially lining sidewalls of the cavities. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A sensor, comprising:
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an array of chemically-sensitive field effect transistors (chemFETs); a dielectric layer over the chemFETs in the array, the dielectric layer defining cavities corresponding to sensing surfaces of the chemFETs; a conformal layer of sensing material within the cavities, the layer of sensing material coupled to the sensing surfaces of the chemFETs and substantially lining sidewalls of the cavities; and a microfluidic structure in fluid flow communication with the cavities, and arranged to deliver analytes for sequencing. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification