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Inspection Method and Apparatus

  • US 20120330592A1
  • Filed: 05/29/2012
  • Published: 12/27/2012
  • Est. Priority Date: 06/21/2011
  • Status: Active Grant
First Claim
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1. A method of operating a metrology apparatus comprising:

  • defining one or more monitoring target profiles;

    collecting and storing initial calibration data of the metrology apparatus;

    compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data;

    obtaining current calibration data from the apparatus;

    modeling a metrology measurement based on the current calibration data; and

    determining, using the contents of the library, any differences between one or more values of the modeling parameters used in the modeling that are resultant from differences in the initial calibration data and the current calibration data.

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