Inspection Method and Apparatus
First Claim
1. A method of operating a metrology apparatus comprising:
- defining one or more monitoring target profiles;
collecting and storing initial calibration data of the metrology apparatus;
compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data;
obtaining current calibration data from the apparatus;
modeling a metrology measurement based on the current calibration data; and
determining, using the contents of the library, any differences between one or more values of the modeling parameters used in the modeling that are resultant from differences in the initial calibration data and the current calibration data.
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Accused Products
Abstract
A method defines one or more monitoring target profiles, collects and stores initial calibration data of the metrology apparatus, compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data. Some operations can be performed periodically, e.g., on a daily basis: obtaining current calibration data from the apparatus, modeling the effect of the current calibration data on the metrology apparatus operation, and using the result of the modeling and the contents of the library to determine any differences between one or more values of the initial calibration data and the current calibration data, and how these changes will be translated into changes in the measurement output for a given number of stacks and geometries.
14 Citations
18 Claims
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1. A method of operating a metrology apparatus comprising:
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defining one or more monitoring target profiles; collecting and storing initial calibration data of the metrology apparatus; compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data; obtaining current calibration data from the apparatus; modeling a metrology measurement based on the current calibration data; and determining, using the contents of the library, any differences between one or more values of the modeling parameters used in the modeling that are resultant from differences in the initial calibration data and the current calibration data. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A computer readable medium having stored thereon computer-executable instructions, execution of which by a computing device causes the computing device to perform operations comprising:
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defining one or more monitoring target profiles; collecting and storing initial calibration data of the metrology apparatus;
compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data;obtaining current calibration data from the apparatus; modeling a metrology measurement based on the current calibration data; and determining, using the contents of the library, any differences between one or more values of the modeling parameters used in the modeling that are resultant from differences in the initial calibration data and the current calibration data.
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9. A method comprising:
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defining a monitoring target profile; collecting and storing initial calibration data of a metrology apparatus; compiling a library of spectra that would be observed from inspection of the monitoring target profile using the metrology apparatus calibrated according to the initial calibration data; obtaining current calibration data from the apparatus; modeling a metrology measurement based on the current calibration data; and determining, using the contents of the library, any differences between a value of the modeling parameters used in the modeling that are resultant from differences in the initial calibration data and the current calibration data. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A computer readable medium having stored thereon computer-executable instructions, execution of which by a computing device causes the computing device to perform operations comprising:
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defining a monitoring target profile; collecting and storing initial calibration data of a metrology apparatus; compiling a library of spectra that would be observed from inspection of the monitoring target profile using the metrology apparatus calibrated according to the initial calibration data; obtaining current calibration data from the apparatus; modeling a metrology measurement based on the current calibration data; and using the contents of the library to determine any differences between a value of the modeling parameters used in the modeling, that are resultant from differences in the initial calibration data and the current calibration data.
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Specification