PRESSURE MEASUREMENT DEVICE HAVING AN OPTIMIZED SENSITIVITY
First Claim
1. A MEMS and/or NEMS pressure measurement device comprising:
- at least one deformable membrane suspended on a substrate, one of the faces of the membrane being intended to be subjected to the pressure to be measured,a detector of the deformation of the membrane, said detector being provided at least partly on the substrate, anda device for transmitting the deformation of the membrane to the detector, said transmission device being non-deformable, said transmission device being rotatably hinged to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing a face of the membrane opposite to the face intended to be subjected to the pressure to be measured so that at least beyond a given pressure, said transmission device and the membrane are movably integral with each other and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane.
1 Assignment
0 Petitions
Accused Products
Abstract
A MEMS and/or NEMS pressure measurement device comprising a deformable membrane suspended on a substrate, one of the faces of the membrane being intended to be subjected to the pressure to be measured, detection means with strain gauges for the deformation of the membrane, said detection means being formed on a substrate and a non-deformable arm, transmitting the deformation in an amplified manner of the membrane to the detection means, the arm being rotatably hinged to the substrate about an axis (Y) substantially parallel to the plane of the membrane and which is integral with the membrane so that it transmits a deformation of the membrane to the detection means in an amplified manner.
-
Citations
31 Claims
-
1. A MEMS and/or NEMS pressure measurement device comprising:
-
at least one deformable membrane suspended on a substrate, one of the faces of the membrane being intended to be subjected to the pressure to be measured, a detector of the deformation of the membrane, said detector being provided at least partly on the substrate, and a device for transmitting the deformation of the membrane to the detector, said transmission device being non-deformable, said transmission device being rotatably hinged to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing a face of the membrane opposite to the face intended to be subjected to the pressure to be measured so that at least beyond a given pressure, said transmission device and the membrane are movably integral with each other and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
-
Specification