HERMETICALLY SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT WITH VERTICALLY INTEGRATED ELECTRONICS
First Claim
1. A Microelectromechanical Systems (MEMS) device with integrated electronics,the MEMS device comprising:
- an integrated circuit substrate, wherein the integrated circuit substrate includes at least one circuit coupled to at least one fixed electrode; and
a MEMS subassembly coupled to the integrated circuit substrate,wherein the MEMS subassembly includes at least one standoff formed by a lithographic process, a flexible plate with a top surface and a bottom surface,and a MEMS electrode coupled to the flexible plate and electrically coupled to the at least one standoff,wherein a force acting on the flexible plate causes a change in a gap between the MEMS electrode and the at least one fixed electrode.
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Accused Products
Abstract
A system and method for providing a MEMS device with integrated electronics are disclosed. The MEMS device comprises an integrated circuit substrate and a MEMS subassembly coupled to the integrated circuit substrate. The integrated circuit substrate includes at least one circuit coupled to at least one fixed electrode. The MEMS subassembly includes at least one standoff formed by a lithographic process, a flexible plate with a top surface and a bottom surface, and a MEMS electrode coupled to the flexible plate and electrically coupled to the at least one standoff. A force acting on the flexible plate causes a change in a gap between the MEMS electrode and the at least one fixed electrode.
66 Citations
20 Claims
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1. A Microelectromechanical Systems (MEMS) device with integrated electronics,
the MEMS device comprising: -
an integrated circuit substrate, wherein the integrated circuit substrate includes at least one circuit coupled to at least one fixed electrode; and a MEMS subassembly coupled to the integrated circuit substrate, wherein the MEMS subassembly includes at least one standoff formed by a lithographic process, a flexible plate with a top surface and a bottom surface, and a MEMS electrode coupled to the flexible plate and electrically coupled to the at least one standoff, wherein a force acting on the flexible plate causes a change in a gap between the MEMS electrode and the at least one fixed electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for providing a Microelectromechanical Systems (MEMS) device with integrated electronics, the method comprising:
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providing an integrated circuit substrate, wherein the integrated circuit substrate includes at least one circuit coupled to at least one fixed electrode; and coupling a MEMS subassembly to the integrated circuit substrate, wherein the MEMS subassembly includes at least one standoff formed by a lithographic process, a flexible plate with a top surface and a bottom surface, and a MEMS electrode coupled to the flexible plate and electrically coupled to the at least one standoff, wherein a force acting on the flexible plate causes a change in a gap between the MEMS electrode and the at least one fixed electrode. - View Dependent Claims (19, 20)
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Specification