AUTOMATED INLINE DEFECT CHARACTERIZATION
First Claim
1. A computer implemented method for performing defect characterization comprising:
- importing a layout for a semiconductor circuit;
importing a netlist for the semiconductor circuit;
obtaining images of a semiconductor chip which comprises the semiconductor circuit during fabrication;
detecting a defect in one of the images of the semiconductor chip wherein the defect is at a location on a portion the semiconductor chip that is represented by the layout; and
performing electrical analysis of the netlist with the defect which was detected.
1 Assignment
0 Petitions
Accused Products
Abstract
Defect characterization is a useful tool for analyzing and improving fabrication for semiconductor chips. By using layout and netlist in combination with images of semiconductors, defects can be identified and analyzed. Electrical simulation can be performed on the netlist, based on the presence of the defect that was detected. Layout geometries where the defect was detected can be binned and a search can be performed of the remainder of the layout for similar groupings of layout geometries. Various representations of the semiconductor can be cross mapped, including layout, schematic, and netlist. The presence of certain defects can be correlated to yield, performance, and other characteristics.
-
Citations
43 Claims
-
1. A computer implemented method for performing defect characterization comprising:
-
importing a layout for a semiconductor circuit; importing a netlist for the semiconductor circuit; obtaining images of a semiconductor chip which comprises the semiconductor circuit during fabrication; detecting a defect in one of the images of the semiconductor chip wherein the defect is at a location on a portion the semiconductor chip that is represented by the layout; and performing electrical analysis of the netlist with the defect which was detected. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 26, 27, 28, 29, 30, 31, 32, 33, 34, 40)
-
-
20-25. -25. (canceled)
-
35-39. -39. (canceled)
-
41. A computer program product embodied in a non-transitory computer readable medium for defect characterization, the computer program product comprising:
-
code for importing a layout for a semiconductor circuit; code for importing a netlist for the semiconductor circuit; code for obtaining images of a semiconductor chip which comprises the semiconductor circuit during fabrication; code for detecting a defect in one of the images of the semiconductor chip wherein the defect is at a location on a portion the semiconductor chip that is represented by the layout; and code for performing electrical analysis of the netlist with the defect which was detected.
-
-
42. A computer system for defect characterization comprising:
-
a memory for storing instructions; one or more processors coupled to the memory wherein the one or more processors, when executing the instructions which are stored, are configured to; import a layout for a semiconductor circuit; import a netlist for the semiconductor circuit; obtain images of a semiconductor chip which comprises the semiconductor circuit during fabrication; detect a defect in one of the images of the semiconductor chip wherein the defect is at a location on a portion the semiconductor chip that is represented by the layout; and perform electrical analysis of the netlist with the defect which was detected.
-
-
43. A computer program product embodied in a non-transitory computer readable medium for defect characterization, the computer program product comprising:
-
code for importing a layout for a semiconductor circuit; code for importing a netlist for the semiconductor circuit; code for obtaining images of a semiconductor chip which comprises the semiconductor circuit during fabrication; code for detecting a defect larger than a critical dimension in one of the images of the semiconductor chip; and code for performing electrical analysis of the netlist with the detected defect.
-
Specification