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USE OF ION BEAM TAILS TO MANUFACTURE A WORKPIECE

  • US 20130008494A1
  • Filed: 07/07/2011
  • Published: 01/10/2013
  • Est. Priority Date: 07/07/2011
  • Status: Active Grant
First Claim
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1. A method of implanting a workpiece comprising:

  • implanting said workiece with an n-type dopant in a first region, said first region having a center and a periphery; and

    implanting said workpiece with a p-type dopant in a second region complementary to said first region, said second region having a center and a periphery, wherein said periphery of said first region and said periphery of said second region at least partially overlap and wherein a dose at said periphery of said first region is less than a dose at said center of said first region and a dose at said periphery of said second region is less than a dose at said center of said second region.

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