SEMICONDUCTOR ELEMENT-EMBEDDED SUBSTRATE, AND METHOD OF MANUFACTURING THE SUBSTRATE
First Claim
1. A semiconductor element-embedded substrate comprising:
- a semiconductor element;
a chip component;
a peripheral insulating layer covering at least outer circumferential side surfaces of the semiconductor element and the chip component;
an upper surface-side wiring line provided on the upper surface side of the wiring substrate; and
a lower surface-side wiring line provided on the lower surface side of the wing substrate,wherein the semiconductor element comprises a terminal on the upper surface side thereof, the terminal being electrically connected to the upper surface-side wiring line, andthe chip component comprises;
an upper surface-side terminal electrically connected to the upper surface-side wiring line;
a lower surface-side terminal electrically connected to the lower surface-side wiring line; and
a through-chip via penetrating through the chip component to connect the upper surface-side terminal and the lower surface-side terminal.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor element-embedded substrate includes a semiconductor element; a chip component; a peripheral insulating layer covering at least the outer circumferential side surfaces thereof; an upper surface-side wiring line provided on the upper surface side of the substrate; and a lower surface-side wiring line provided on the lower surface side of the substrate. The built-in semiconductor element includes a terminal on the upper surface side thereof, and this terminal is electrically connected to the upper surface-side wiring line. The built-in chip component includes an upper surface-side terminal electrically connected to the upper surface-side wiring line; a lower surface-side terminal electrically connected to the lower surface-side wiring line;
and a through-chip via penetrating through the chip component to connect the upper surface-side terminal and the lower surface-side terminal.
76 Citations
26 Claims
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1. A semiconductor element-embedded substrate comprising:
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a semiconductor element; a chip component; a peripheral insulating layer covering at least outer circumferential side surfaces of the semiconductor element and the chip component; an upper surface-side wiring line provided on the upper surface side of the wiring substrate; and a lower surface-side wiring line provided on the lower surface side of the wing substrate, wherein the semiconductor element comprises a terminal on the upper surface side thereof, the terminal being electrically connected to the upper surface-side wiring line, and the chip component comprises; an upper surface-side terminal electrically connected to the upper surface-side wiring line; a lower surface-side terminal electrically connected to the lower surface-side wiring line; and a through-chip via penetrating through the chip component to connect the upper surface-side terminal and the lower surface-side terminal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of manufacturing a wiring substrate comprising a semiconductor element built therein, the method comprising:
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mounting a semiconductor element including a terminal on the upper surface side thereof on a support medium with the lower surface of the semiconductor element facing the support medium side; mounting a chip component including terminals on the upper surface side and the lower surface side thereof on the support medium; forming a peripheral insulating layer for covering the semiconductor element and the chip component; removing the support medium; forming a first wiring line for electrical connection with the lower surface-side terminal of the chip component; and forming a second wiring line for electrical connection with the terminal of the semiconductor element and the upper surface-side terminal of the chip component, wherein the chip component includes a through-chip via penetrating through the chip component to connect the upper surface-side terminal and the lower surface-side terminal. - View Dependent Claims (18, 19, 23, 24)
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20. A method of manufacturing a wiring substrate comprising a semiconductor element built therein, the method comprising:
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forming at least a first wiring line on a support medium; mounting a semiconductor element including a terminal on the upper surface side thereof on the support medium with the lower surface of the semiconductor element facing the support medium side; mounting a chip component including terminals on the upper surface side and the lower surface side thereof on the support medium, such that the lower surface-side terminal is electrically connected to the first wiring line; forming a peripheral insulating layer for covering the semiconductor element and the chip component; removing the support medium; and forming a second wiring line for electrical connection with the terminal of the semiconductor element and the upper surface-side terminal of the chip component, wherein the chip component includes a through-chip via penetrating through the chip component to connect the upper surface-side terminal and the lower surface-side terminal. - View Dependent Claims (21, 22, 25, 26)
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Specification