MEMS RESONATOR
First Claim
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1. A MEMS resonator comprising:
- a resonator mass in a form of a closed ring;
a set of at least one anchor points spaced around the ring, where the ring is connected to a fixed substrate at the anchor point(s);
a set of ring comb electrode arrangements fixed to the ring;
at least one drive comb electrode arrangement attached to the substrate and which interfaces with one of the set of comb electrode arrangements fixed to the ring;
at least one sense comb electrode arrangement attached to the substrate and which interfaces with another one of the set of comb electrode arrangements fixed to the ring; and
a control circuit for controlling signals applied to the at least one drive comb electrode arrangement.
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Abstract
A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.
17 Citations
11 Claims
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1. A MEMS resonator comprising:
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a resonator mass in a form of a closed ring; a set of at least one anchor points spaced around the ring, where the ring is connected to a fixed substrate at the anchor point(s); a set of ring comb electrode arrangements fixed to the ring; at least one drive comb electrode arrangement attached to the substrate and which interfaces with one of the set of comb electrode arrangements fixed to the ring; at least one sense comb electrode arrangement attached to the substrate and which interfaces with another one of the set of comb electrode arrangements fixed to the ring; and a control circuit for controlling signals applied to the at least one drive comb electrode arrangement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification